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FILMETRICS F54 Specifications

General

Accuracy	2nm or 0.2%
Precision	0.2nm
Stability	0.05nm
Wavelength range	380-1050nm
Spot size	250um aperture: 50um@5x, 17um@15x (on request) 500um aperture: 100um@5x, 33um@15x
Typical speed	5 points: 5’’ 25 points: 25’’ 56 points: 29’’

Weight and Dimensions

Thickness Range	~20nm -- ~40um