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Gatan 600 DUOMILL - User Manual

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Table of Contents

Question and Answer IconNeed help?

Do you have a question about the Gatan 600 DUOMILL and is the answer not in the manual?

Summary

About this Guide

Copyright, Trademarks, and Patents

Details copyright, registered trademarks, and patents associated with the product.

General Description

Main Work Chamber

Details the main chamber, ion guns, stages, and Whisperlok assembly of the DuoMill.

Gas Control System

Explains the gas circuits, regulators, needle valves, and solenoid valves for the DuoMill.

Vacuum System

Describes the vacuum pumps, roughing pump, and evacuation processes in the DuoMill.

Electrical System

Covers the DuoMill's electrical system, power inputs, and vacuum control circuit for ion beams.

Introduction to Ion Milling

Factors Influencing Sputtering Rates

Discusses primary and secondary factors affecting sputtering rates in ion milling.

Ion Current and Specimen Thinning Rate

Explains ion current measurement, Faraday cage, and thinning rate specifications for the DuoMill.

Installation Procedure

Site Preparation

Details site requirements, power, electrical wiring, and argon gas connection for installation.

Unpacking Instructions

Provides step-by-step instructions for unpacking the DuoMill and its components.

Installation

Guides on connecting argon gas, power, and initial setup after unpacking.

Operating Instructions (short form)

Pre-Start-Up Check List

A checklist of essential pre-operation checks for the DuoMill system.

Start-Up Procedure

Steps to initiate the DuoMill system, including pump activation and pressure checks.

Specimen Loading

Procedure for loading specimens into the Airlock and Work Chamber.

Switching on the Ion Beams - Current Limit Mode

Instructions for activating ion beams using current limit mode, with caveats for low-energy guns.

Switching on the Ion Beams - Voltage Regulated Mode

Procedure for turning on ion beams in voltage-regulated mode.

Detailed Operating Instructions

Pre-Start-Up Check List

A detailed checklist for pre-operation checks of the DuoMill.

Start-Up Procedure

Steps for starting up the DuoMill system, including pump activation.

Specimen Loading and Sputter Shield

Procedure for loading specimens and placing the sputter shield correctly.

Milling Modes

Explains the different modes for operating the DuoMill high-voltage supplies.

Changing Cathode Hole Positions in the Octoguns

Procedure for changing cathode hole positions in the Octoguns for maintenance.

Specimen Examination

Procedure for raising the specimen for examination and resuming milling.

Specimen Removal

Steps for safely removing the specimen from the Airlock.

Shut Down and Venting Procedure

Procedure for shutting down the DuoMill and venting the system.

Operation of Accessories

Dual AutoTerminators

Details the principle, installation, and operation of the Dual AutoTerminator.

Principle of Operation

Explains how the laser AutoTerminator functions to detect specimen perforation.

Installation and Laser Alignment Check

Covers general setup, standard Whisperlok, and cold-style Whisperlok installation.

Operating Procedure

Procedures for operating the AutoTerminator with opaque and transparent specimens.

Removing the Laser AutoTerminator

Steps for safely removing the laser auto-terminator assembly.

Laser Beam Alignment

Procedure for aligning the laser beam if the tube is replaced or misaligned.

Replacement of the Laser Tube

Instructions for replacing the laser tube in the assembly.

Maintenance

Routine maintenance checks for the laser auto-terminator.

Liquid Nitrogen Cold Stage

Details specimen cooling using a liquid nitrogen cold stage.

Installation

Steps for installing the Cold Style Whisperlok and connecting liquid nitrogen.

Operation

Procedure for specimen loading, cooling, and operation with the cold stage.

Operation of the AutoTerminator with the Cold Stage

How to operate the AutoTerminator when using the cold stage.

Liquid Nitrogen Cold Trap

Use of the cold trap to reduce hydrocarbons and water vapor in the Work Chamber.

Specimen Viewing Microscope

Instructions for using the microscope to view specimens in the Airlock.

Electronic Gas Flow Control (EGC)

Details installation and operation of the EGC system.

Installation

Steps for installing the Electronic Gas Flow Control unit.

Operating Procedure

Procedure for setting up and operating the EGC for gun control.

EGC Balance Procedure

Procedure to balance gun output if one appears more brilliant than the other.

EGC Functional Setup Procedure

Steps for setting up the EGC functional parameters.

Switching off the Ion Beams

Safe methods for switching off the ion beams.

Chemical Milling

Background on chemical milling and the CAIBE option.

Installation of the CAIBE System

Instructions for installing the CAIBE system into the DuoMill.

Loading the Chemical Source into the CAIBE System

Procedure for loading chemical sources into the CAIBE system capsule.

Operation of the CAIBE System

Operating the CAIBE system, including specimen loading and optimal flow determination.

Digital Process Timer

Description and operation of the digital process timer.

Sector Speed Control (SSC)

Introduction to the Sector Speed Control (SSC) for specimen rotation.

Operating Procedure

Operating procedures for double-sector and single-sector thinning modes.

Specimen Loading

Instructions for loading specimens onto the SSC holder.

Switching on the SSC

Description of SSC operating modes and speed settings.

Routine Maintenance and Servicing

Cleaning the Airlock Capsule Viewing Window

Procedure for cleaning the viewing window of the Airlock capsule.

Servicing the Vacuum Seals in the Whisperlok Mechanism

Steps for servicing vacuum seals in the Whisperlok mechanism.

Cleaning the Whisperlok Aperture Assembly

Procedure for cleaning the Whisperlok aperture assembly.

Changing Cathodes and Insulators

Procedure for changing cathodes and insulators in the ion guns.

Using the Airlock O-Ring Lubrication Tool

Using the lubrication tool to maintain the Airlock O-ring.

Cleaning the Cold Cathode Gauge Tube

Procedure for cleaning the cold cathode gauge tube.

Argon Gas Leaks

Detecting and fixing argon gas leaks in the system.

Vacuum System Maintenance

Maintenance procedures for vacuum pumps and filters.

Pfeiffer Molecular Drag Pump

Maintenance and oil cartridge replacement for the Pfeiffer Molecular Drag Pump.

Blazers Diaphragm Pump

Maintenance for the Balzers diaphragm pump.

Chemical Filter

Details the chemical filter and its indicator strip.

Routine Maintenance Schedule

A schedule outlining maintenance operations and their frequencies.

Spare Parts List

Specimen Holders

List of various specimen holders and their part numbers.

Sector Speed Control (Model 600.48000)

Spare parts for the Sector Speed Control unit.

Airlock (Model 600.05000)

Spare parts list for the Airlock module.

Auto-terminator (Model 600.32000)

Spare parts for the Auto-terminator unit.

Cold-Cathode Gauge (Model 600.22000)

Spare parts for the Cold-Cathode Gauge.

Gas Distribution Assembly (Model 600.07000)

Spare parts for the gas distribution assembly.

O-Ring Kits

List of various O-ring kits available for the instrument.

Gatan Product Warranty

Customer Responsibilities

Outlines customer duties for maintaining warranty, including maintenance and part usage.

Repairs and Replacements

Details Gatan's process for repairing or replacing defective instruments and parts.

Warranty Limitations

Lists exclusions from the product warranty coverage.

Warranty Exclusions

Specifies finite lifetimes for consumable and wear parts.

Post Warranty Period Support and Product Obsolescence

Describes Gatan's service support policy after the warranty period.

Liability Limitations

States Gatan's limitations of liability and warranty terms.

Gatan Distributors and Agents

Argentina

List of Gatan distributors and agents in Argentina.

Australia

List of Gatan distributors and agents in Australia.

Brazil

List of Gatan distributors and agents in Brazil.

Canada

List of Gatan distributors and agents in Canada.

Denmark

List of Gatan distributors and agents in Denmark.

France

List of Gatan distributors and agents in France.

Greece

List of Gatan distributors and agents in Greece.

Hungary

List of Gatan distributors and agents in Hungary.

India

List of Gatan distributors and agents in India.

Israel

List of Gatan distributors and agents in Israel.

Italy

List of Gatan distributors and agents in Italy.

Japan

List of Gatan distributors and agents in Japan.

Korea

List of Gatan distributors and agents in Korea.

Kuwait

List of Gatan distributors and agents in Kuwait.

Mexico

List of Gatan distributors and agents in Mexico.

Norway

List of Gatan distributors and agents in Norway.

Pakistan

List of Gatan distributors and agents in Pakistan.

Peoples Republic of China

List of Gatan distributors and agents in the People's Republic of China.

Portugal

List of Gatan distributors and agents in Portugal.

Republic of South Africa

List of Gatan distributors and agents in the Republic of South Africa.

Singapore

List of Gatan distributors and agents in Singapore.

Spain

List of Gatan distributors and agents in Spain.

Sweden

List of Gatan distributors and agents in Sweden.

Switzerland

List of Gatan distributors and agents in Switzerland.

Republic of China

List of Gatan distributors and agents in the Republic of China (Taiwan).

Thailand

List of Gatan distributors and agents in Thailand.

Netherlands

List of Gatan distributors and agents in the Netherlands.

Turkey

List of Gatan distributors and agents in Turkey.

Venezuela

List of Gatan distributors and agents in Venezuela.

Declaration of Conformity

Manufacturers Name

Identifies the manufacturer as Gatan Inc.

Product Name

Specifies the product name as DuoMill.

Model Number

States the model number of the product as 600.

Conforms to European Directives

Lists European Directives the product complies with.

Supplementary Information

Provides supplementary safety and EMC information.

Gatan 600 DUOMILL Specifications

General IconGeneral
BrandGatan
Model600 DUOMILL
CategoryLaboratory Equipment
LanguageEnglish