Home
Granville-Phillips
Control Unit
Series 354
Granville-Phillips Series 354 - User Manual
48 pages
Manual
Specs
Ask a question
Save Page as PDF
To Next Page
To Next Page
Loading...
Granville-Phillips
®
Series 354 Micro-Ion
®
Vacuum Gauge Module with
RS-485 Digital Interface
Instruction manual p
art number 3540
08
Revision C -
September
2014
Series 354
Instruction Manual
2
Table of Contents
Main Page
Default Chapter
7
General Information
7
Service Guidelines
8
Chapter 2 Safety
9
Grounding Requirements
11
Over-Pressure Conditions
12
Responsibility
13
Damage Requiring Service
14
Chapter 3 Introduction
15
Specifications
16
Power Supply Requirements
17
Component Description
18
Mounting Flange
19
Emission Current
20
Chapter 4 Installation and Configuration
21
Installation
23
Firmware Configuration
24
Resetting the Data Communication Parameters
25
Calculating a Gas Sensitivity Correction
26
Micro-Ion Vacuum Gauge Module Process Chamber Baking
27
Chapter 5 RS-485 Digital Interface Specifications and Protocol
29
Receive/Transmit Timing
34
Troubleshooting
35
Introduction
37
Chapter 7 Service
39
Initialization
45
Digital Interface
48
Need help?
Do you have a question about the Granville-Phillips Series 354 and is the answer not in the manual?
Ask a question
Granville-Phillips Series 354 Specifications
General
Brand
Granville-Phillips
Model
Series 354
Category
Control Unit
Language
English
Need help?
General
To Next Page