11
1.C Expose
→ For small samples :
1. Open the window 2. Place your sample in the centre of the chuck (best to align it in X
and Y directions) 3. activate the vacuum 4. close the door → Follow screen instructions
→ Next steps depend on your job :
1) Standard [s.12] 2) Standard with alignment [s.13] 3) Series [s.15]
You will need to determine the centre of your sample. Move
with the arrows or the target tool to go manually to the
centre of your sample (Target tool is always enable at
beginning, simply click on the substrate where you think is
the middle, you will be able to fine tune the position later)
Validate the position only when you are at the centre of
the substrate !
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