When the DC bias current is less than 1 mA, apply N value at 1 mA.
When integration time is set to SHORT, multiply N value by5.
When integration time is set to LONG, multiply N value by 0.5.
Table 9-7.
Coefficient Related to Test Frequency and Measurement
Range
Meas.
Range
Test Frequency f
m
[Hz]
20
f
m
<
100 100
f
m
<
1k 1k
f
m
<
10 k 10 k
f
m
1M
100 0.75 0.225 0.045 0.015
300 2.5 0.75 0.15 0.05
1k 7.5 2.25 0.45 0.15
3k 25 7.5 1.5 0.5
10 k 75 22.5 4.5 1.5
30 k 250 75 15 5
100 k 750 225 45 15
Calculation Example
Measurement Conditions
DUT : 100 pF
Test signal level : 20 mV
rms
Test frequency : 10 kHz
Integration time : MEDIUM
Then, DUT's imp edance = 1/(2
2
10
4
2
100
2
10
-12
) = 159 k
Measurement range is 100 k
DC bias current
<<
1mA
P = 15 (according to Table A)
A
e
of relative measurement accuracy without bias current
isolation is
6
0.22 [%]. (Refer to \relative measurement
accuracy" of sp ecication.)
Then, N =15
2
(159
2
10
3
)/(100
2
10
3
)
2
1/(20
2
10
-3
)
2
10
-4
= 0.12 [%]
Therefore, Relative Capacitance measurement accuracy is:
6
(0.22+0.12) =
6
0.34 [%]
General Information 9-25
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