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General| Software | CompleteEASE |
|---|---|
| Category | Spectroscopic Ellipsometer |
| Angle of Incidence | Variable |
| Measurement Type | Spectroscopic Ellipsometry |
| Angle of Incidence Range | 45° to 90° |
| Measurement Speed | Fast |
| Detector Type | CCD or InGaAs, depending on model |
| Sample Size | Up to 200 mm in diameter |
| Beam Diameter | Approximately 2 mm |
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