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J.A. Woollam alpha-SE User Manual

J.A. Woollam alpha-SE
96 pages
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alpha-SE
®
Spectroscopic
Ellipsometer
Hardware Manual

Table of Contents

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J.A. Woollam alpha-SE Specifications

General IconGeneral
BrandJ.A. Woollam
Modelalpha-SE
CategoryMeasuring Instruments
LanguageEnglish

Summary

Safety Instructions

Message Boxes

Explains the meaning of Warning, Caution, and Note boxes used in the manual.

General Safety Instructions

Provides general safety guidelines for operating the equipment safely.

Environmental Operating Range

Specifies the recommended temperature and humidity for operation.

Quick Guide

Manual Overview

Describes the organization and content of the manual's chapters.

Quick Setup

Provides a step-by-step guide for initial setup of the alpha-SE system.

System Installation

alpha-SE Specifications

Details the measurement and data analysis capabilities of the alpha-SE system.

Facilities Requirements

Lists the power, weight, and computer requirements for the alpha-SE system.

Unpacking the Hardware

Instructions for unpacking the alpha-SE instrument from its shipping container.

Installing the Software

Step-by-step guide for installing the CompleteEASE software.

Activating the Software

Instructions for activating the CompleteEASE software.

Connecting the alpha-SE

Details how to connect the alpha-SE hardware to the computer.

Running the CompleteEASE Software

Steps to launch and initialize the CompleteEASE software after installation.

Learning Data Analysis

Guides on how to learn data analysis using the CompleteEASE manual.

Initial System Checks and Calibration

Initial System Operation

Overview of system components and initial operational checks.

Changing the Angle of Incidence (AOI)

Procedure for adjusting the angle of incidence for measurements.

Checking Beam Alignment at 90°

Verifies the beam is centered on the detector at the 90° configuration.

Checking Straight-Through SE Data Accuracy

Verifies the accuracy of SE data using air as a reference.

Measuring the Reference Wafer

Details how to measure and analyze data from the reference calibration wafer.

S-T Baseline

Procedure for performing the Straight-Through (S-T) baseline measurement.

Off-Sample Baseline

Procedure for performing the Off-Sample baseline measurement.

Calibrating the Angle of Incidence

Details how to calibrate the angle of incidence for accurate measurements.

Powering Down

Instructions for safely powering down the alpha-SE system.

Data Collection

Measurement Tab Overview

Describes the layout and functions of the Measurement tab in CompleteEASE.

Off-Sample Measurements

Details how to perform standard SE measurements in reflection off-sample.

Straight-Through Measurements

Explains how to perform transmission intensity measurements.

Mueller-matrix Measurements

Describes how to perform Mueller-matrix measurements.

Hardware Tab

Hardware

Describes hardware-related commands like Re-initialize and Park Z-Stage.

Signal

Covers display of signal intensity and Z-Stage scan functionality.

Calibration

Explains S-T Baseline and Off-Sample Baseline calibration procedures.

Show Logs

Details how to view hardware and error logs, and create debug files.

Camera

Describes the optional camera accessory and its functions.

Routine Test Measurement

Guides on performing routine tests to monitor tool stability.

Configuration Files

Explains the role of .cnf files in defining hardware configuration.

Accessories

Focusing

Details the use and alignment of optional focus probes.

Camera

Describes the optional camera accessory and its installation.

Liquid Cell

Describes the alpha-SE liquid cell accessory for measurements under liquid.

Transmission Mount

Describes the transmission mount accessory for vertical sample holding.

Manual Translation

Describes the manual translation stage for fine sample adjustment.

QCM Adaptor

Describes the QCM adaptor accessory for holding Quartz Crystal Microbalances.

Service and Troubleshooting

Lamp Change Procedure

Step-by-step guide for replacing the system lamp.

Upgrading CompleteEASE

Instructions for upgrading the CompleteEASE software.

Troubleshooting Guide

Provides guidance for resolving common problems and error messages.

Appendices

Spectroscopic Ellipsometry

Discusses the principles and advantages of spectroscopic ellipsometry.

Conventions Used in this Manual

Explains conventions used for tabs, panels, and buttons in the manual.

Short-cut Guide

Lists keyboard shortcuts for navigating the CompleteEASE software.

Contacting J.A. Woollam Co.

Provides contact information for J.A. Woollam Co. globally.

Index

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