Karl Suss MA6 User Manual

NANOSYSTEM FABRICATION FACILITY (NFF), HKUST
Version 1.1
Page 1 of 24
Standard Operating Manual
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Karl Suss MA6 Mask Aligner

Karl Suss MA6 Specifications

General

Brand	Karl Suss
Model	MA6
Category	Laboratory Equipment
Language	English

Summary

Process Capabilities

Contact List and How to Become a Qualified User

3.1 Emergency Response and Communications

Provides essential contact numbers for emergencies and facility communication.

Operating Procedures

4.2 Safety Warnings

Lists critical safety precautions and warnings for operating the MA6 equipment.

4.3 Operation Precautions and Rules

Provides essential guidelines and rules for safe and correct operation of the MA6.

4.6 Power on Procedure (For Staff ONLY!)

4.8 Mask Loading

4.9 Wafer Loading

4.10 Top Side Alignment (TSA)

Detailed instructions for performing alignment using the Top Side Alignment microscope.

4.11 Wafer Alignment

Process for aligning the wafer to the mask using stage adjustment knobs.

4.12 Wafer Exposure

Procedure for setting exposure time and initiating the UV exposure process.

4.13 Mask Unloading

4.14 Bottom Side Alignment (BSA)

Instructions for aligning backside patterns using the bottom microscope.

4.18 Machine Shutdown (For Staff ONLY!)