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eHC 3005A
Kaufman & Robinson eHC 3005A User Manual
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Kaufman & Robinson, Inc.
1306 Blue Spruce Drive, Unit
A
Fort Collins, CO 80524
T
el: 970-495-0187, Fax: 970-484-9350
Internet: www
.ionsources.com
Copyright © 2007 by Kaufman & Robinson, Inc.
All rights reserved. No part of this publication
may be reproduced without written permission.
December 2007
VERSION 3
AUT
OMA
TED CONTROLLER MANUAL
FOR
eH End-Hall Ion Source with
Hollow Cathode
Models: eHC 3005A
eHC 30010A
eHC 15015A
2
Table of Contents
Table of Contents
2
Safety
5
General Description and Specifications
6
Controller Specifi Cations
6
Auto Controller
7
Keeper Power Supply
7
Emission Power Supply
7
Discharge Power Supply
8
Mass Flow Controllers
8
Front View of Controller for End Hall Ion Source
10
Rear View of Controller for End Hall Ion Source
11
Installation
12
Unpack
12
Install in Rack Mount Cabinet
13
Ground Connections
13
Connections between Controller Components
14
Connect Controller to Ion Source
17
Initial Operation
20
Gas
20
Power on
20
Operating Mode
20
Auto Gas Mode
20
Program Select
21
Gas Setpoints
21
Keeper Current Setpoint
22
Emission Setpoints
22
Discharge Parameters
23
Enable
23
Standby
24
Setpoint Adjustment
24
Saving a Program
24
Gas Only Mode
25
Constant Current Mode
26
Constant Voltage Mode
28
Manual Gas Mode
29
General Operation
31
Description of Ion-Source/Controller Components
31
Remote/Automated Control
34
Remote Control Using the DB-25 Connector
34
Remote Control Using the DB-37 Connector
34
Remote Enable of the Four Stored Programs Using the
34
Connector
34
Connector
35
Remote Analog Setpoint Option on the DB-37 Connector
36
Analog Outputs for the DB-37 Connector
37
Pin Descriptions for the Analog Inputs on the DB-37 Connector
37
Run Fault and Beam Good on the DB-37 Connector
39
Description of the DB-37 Pins
39
Run Fault and Beam Good Pin Descriptions
39
Interlock
42
Remote Control Using the RS-232 Serial Interface
43
Interface Cable
43
Communication Settings
43
Communication Overview
43
Commands, Queries and Responses
43
VRB - Verbose Command
44
COM - Enable RS-232 Command or Status Query
45
IDN? - Unit Identifi Cation Query
46
RST - Reset Command
47
TST? - Self Test Query
47
OUT - System Level Output Control Command
48
MDE - Mode Set Command or Mode Query
48
BEAM - Beam Good Query
49
P - Program Value Read/Write Command
50
Feedback Values
54
CFG? - Query Current System Confi Guration
55
LRN - Learn Command or Learn Query
55
Diagnostics
57
Auto Controller
57
Help Codes and Error Messages for the Auto Controller
57
Keeper Power Supply
60
Help Codes and Error Messages for the Keeper Power Supply
61
Emission and Discharge Power Supplies
62
Help Codes and Error Messages for the Emission and Discharge Power Supplies
62
Appendix
64
Auto Controller Setup
64
Limited Warranty
66
Service and Technical Information
67
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Kaufman & Robinson eHC 3005A Specifications
General
Brand
Kaufman & Robinson
Model
eHC 3005A
Category
Power Supply
Language
English
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