Lakeshore CRX-EM-HF User Manual

Lake Shore Cryotronics, Inc. 575 McCorkle Blvd Westerville, Ohio 43082
Tel: (614) 891-2244 Fax: (614) 818-1600 e-mail: info@lakeshore.com www.lakeshore.com
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CRX-EM-HF Probe Station Instructions
Introduction
The Lake Shore Model CRX-EM-HF probe station combines the magnetic field capability of the Model EMPX-HF
probe station with the cryogen free capability of the model CRX-4K. The CRX-EM-HF is for non-destructive testing
of devices on full and partial wafers up to 25mm (1 in) in diameter. Based on a two-stage Gifford McMahon closed
cycle refrigerator (CCR), the CRX-EM-HF provides up to a ±0.6 T magnetic field over a temperature range of <8 K to
400 K standard or <20 K to 500 K with optional PS-HTA-EM high temperature stage.
Figure 1: CRX-EM-HF probe station
Rev 1.1 P/N 119-510 March 24, 2014

Lakeshore CRX-EM-HF Specifications

General

Brand	Lakeshore
Model	CRX-EM-HF
Category	Industrial Equipment
Language	English

Summary

Introduction

Specifications

System Overview

Installation and Setup

Site Requirements

Requirements for installing the instrument console, CCR, and electromagnet.

Unpacking the Probe Station

Guide for uncrating and unpacking the probe station.

Utility Connections

Utility connections for the instrument console, CCR, and electromagnet.

Assembling a Basic Probe System Configuration

Steps for assembling the probe station configuration.

Installing and Removing Probes

Instructions for installing and removing probes.

Re-configuring the Sample Stage

Configuration options for the sample stage rotation.

System Verification and Testing

Basic Operation

Temperature Limits

Maximum temperature limits for probe station components and stages.

Vacuum, Probing, and Sample Operation

Procedures for vacuum, probe arm, sample exchange, and probing.

Temperature Operation

Details on operating the probe station at various temperatures.

Controls for Temperature Operation

Information on CCR and electronic controls for temperature operation.

Cooling the Probe Station to Base Temperature

Procedure for cooling the probe station to its base temperature.

Operating the Sample Stage from Base Temperature to 350 K

Steps to operate the sample stage from base temp to 350 K.

Operating the Sample Stage from 350 K to 400 K

Steps to operate the sample stage from 350 K to 400 K.

Magnetic Field Operation

Optional 360° Rotation Stage Operation

Operation of the optional 360° rotation stage for sample alignment.

Advanced Operation

Optional High Temperature Stage

Details on the optional high temperature stage for extended temperature range.

Configuring for HT Stage Operation

Steps to connect and configure the HT sample stage.

Connections to the Probe Station

Detailed steps for making electrical connections for the HT stage.

Reconfigure Temperature Controller for HT Stage

Reconfigure Model 336 for HT Stage

Verifying and reconfiguring the Model 336 temperature controller for HT stage use.

Re-configuring the Sample Stage

Re-configuring the sample stage for the HT stage.

HT Stage Installation

Procedure for installing the HT stage adapter and the HT stage.

HT Stage Removal and Controller Reconfiguration

Install the HT Sample Stage

Aligning and installing the HT sample stage onto the adapter.

HT Stage Removal

Procedures for removing the HT stage and its adapter.

Reconfigure Controller for Standard Operation

Reconnecting the temperature controller for standard operation.

Temperature Operation with HT Sample Stage

Cooling with HT Sample Stage

Procedure for cooling the probe station with the HT sample stage installed.

Operating HT Stage at Base Temperature

Operating the HT sample stage at base temperature conditions.

Operating HT Stage from 20 K to 300 K

Procedures for operating the HT sample stage from 20 K to 300 K.

HT Sample Stage Operation (300 K to 500 K)

Station Warm Up

Maintenance and Troubleshooting

Maintenance and Troubleshooting References

References for maintenance and troubleshooting procedures for CCR and probe station.

Contacting Lake Shore

Information on how to contact Lake Shore Systems Service for assistance.