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General| Brand | Laurell |
|---|---|
| Model | WS-650 lite Series |
| Category | Computer Hardware |
| Language | English |
Laurell Technologies' commitment to EHS and customer notifications.
Explains alert words, pictograms, and avoidance text for hazard communication.
Details the EMO button function and procedure for station installations.
Guidelines on wearing appropriate Personal Protective Equipment (PPE).
Covers electrical, static, chemical, noise, and moving part hazards with safety measures.
Information on MSDS, chemical handling, abatement, and equipment disposal practices.
Specifies environmental, power, ventilation, and space requirements for installation.
Details how to connect vacuum, seal purge, and power to the spin processor.
Provides links to diagrams for system dimensions and mounting configurations.
Explains how to connect drain lines and optional exhaust systems.
Describes cabling and plumbing for Indeck installations, including control box connections.
Covers power switch functionality and various safety interlocks like lid, vacuum, and exhaust.
Explains the function of keypad buttons and the LCD display modes (Select, Run, Edit, Info).
Details the fields displayed and operations within the Run Mode screen.
Details the fields displayed and operations within the Edit Mode screen for program modification.
Details the fields displayed in Statistics, Configuration, and About sections of the Info Mode.
Step-by-step guide to creating and modifying programs using the controller's interface.
Instructions on selecting and starting a program, including substrate placement and vacuum activation.
Procedures for removing and installing screw-on, press-on, and screw-down chucks.
Information on HPD2 motor capabilities, acceleration, spin speed, and programming specific to HPD2.
How to check firmware version and guidelines for spin speed based on wafer size and chuck type.
Best practices for cleaning the process bowl and avoiding flooding or chemical entry into vacuum path.
Lists error codes, descriptions, and user actions for troubleshooting abnormal conditions.
Procedure for removing, cleaning, and reinstalling the vacuum valve assembly.
Steps for performing a wet test, cleaning, replacing, and identifying chuck O-rings.
Guidelines for motor operation checks and factory calibration procedures.
Information on ordering replacement parts and details of the product warranty.
Provides detailed diagrams for system dimensions and mounting configurations for various models.
Includes templates for deck top layouts and diagrams of the control panel and installation tubing.
