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General| Brand | Laurell |
|---|---|
| Model | WS-400 Lite Series |
| Category | Computer Hardware |
| Language | English |
Laurell Technologies maintains an EHS policy and notifies customers of new issues.
Potential safety hazards associated with the spin processor system are clearly labeled.
Procedure for using the Emergency Machine Off (EMO) capability.
Guidelines for wearing personal protective equipment when handling hazardous chemicals.
Details risks associated with operating the spin processor system.
Discusses environmental aspects like MSDS and chemical disposal.
Details requirements for installation environment: surface, temp, humidity, etc.
Specifies power requirements for the spin processor unit.
Information on the main circuit breaker rating and SEMI S2 requirements.
Provides basic system dimensions and required additional space.
Specifies the designed ambient temperature range for operation.
Discusses required operational negative pressure for the chamber.
Options for dispense liquids: automatic or manual syringe.
Details exhaust requirements for the bench area and drain cup.
Information on the optional LTC provided vacuum pump specifications.
Recommendations for secondary containment and spill prevention features.
General overview of the installation process and unpacking.
Describes how to connect the spin processor to various sources.
Overview of controls, display, program storage, and interlocks.
Details the over current circuit breaker as an ON/OFF switch.
Explanation of lid, vacuum, and seal purge interlocks for safe operation.
Describes the function of each key on the membrane switch keypad.
Explains the information displayed on the LCD screen during operation.
Step-by-step guide for programming the spin processor.
Details how to program acceleration and deceleration rates for motor control.
Steps to select program, place wafer, and start the spin processor.
Instructions for removing and installing different types of chucks.
How to determine the installed software revision level.
Information on programming the HPD2 motor, including acceleration and spin speed.
Recommends cleaning the process bowl after each use and leaving N2/CDA supply on.
Lists error codes (Exx) and their corresponding actions and descriptions.
Provides dimensional data for WS-400 6&8 Lite top and rear views.
Details installation dimensions for WS-400 Lite Indeck front and bottom views.
Diagram for installing the indeck control panel, showing clearances and connections.
Illustrates the installation of tubing for indeck systems with pilot air and exhaust.
