Leybold vacuum TTR90 - User Manual

GA 09.220/3.02
THERMOVAC
Transmitter
TTR90
TTR90-S
Catalog numbers
128 10, 128 20
128 11, 128 21
128 12, 128 22
128 13, 128 23
128 14, 128 24
Operating Manual
Incl. Declaration of Conformity
Product Identification
In all communications with Leybold Vakuum, please specify
the information given on the product nameplate. For conven-
ient reference transfer this information into the diagram be-
low.
Typ:
No:
F-No:
V W
Leybold Vakuum GmbH,
D-50968 Köln
Validity
This document applies to products with the following catalog
numbers:
TTR90 without switching function
128 10
(DN 16 ISO-KF 80 °C)
128 11 (" NPT 80 °C)
128 12 (DN 16 CF-R 250 °C)
128 13 (" tube 80 °C)
128 14 (8 VCR 80 °C)
TTR90-S with switching function
128 20
(DN 16 ISO-KF 80 °C)
128 21 (" NPT 80 °C)
128 22 (DN 16 CF-R 250 °C)
128 23 (" tube 80 °C)
128 24 (8 VCR 80 °C)
The catalog number (No) can be taken from the product
name plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the DN 16 ISO-KF vacuum con-
nection. They apply other vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions are indicated in mm.
Intended Use
The THERMOVAC Transmitters TTR90 and TTR90-S have
been designed for vacuum measurement of gases in the
pressure range of 5×10
-4
… 1000 mbar.
They can be operated in connection with a Leybold Vakuum
controller for THERMOVAC transmitters or with another
evaluation unit.
Functional Principle
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Trademarks
VCR® Swagelok Marketing Co.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and envi-
ronmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.
General Safety Instructions
• Adhere to the applicable regulations and take the ne-
cessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions of the process media due to
the heat generated by the product.
• Adhere to the applicable regulations and take the ne-
cessary precautions for all work you are going to do and
consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
Leybold Vakuum assumes no liability and the warranty
becomes null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.)
to the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Technical Data
Measurement principle thermal conductance
according to Pirani
Measurement range
(air, O
2
, CO, N
2
) 5×10
-4
… 1000 mbar
Accuracy
≈10% of reading in the range
of 1×10
-3
… 100 mbar
(outside of this range up to
factor 2)
Repeatability
≈2% of the measured value in
the range 1×10
-3
… 100 mbar
Output signal
(measuring signal)
Voltage range
0 … ≈+10.3 V
Measurement range
+1.9 V … +10.0 V
Voltage vs. pressure logarithmic, 1.286 V/decade
Error signal <0.5 V (filament rupture)
Output impedance
2×10 Ω
Minimum loaded impedance
10 kΩ, short circuit-proof
Response time
≈10 ms
Transmitter identification
resistance 27 kΩ referenced
to supply common
Adjustment
Potentiometer <HV>
Potentiometer <ATM>
adjustment under 10
-4
mbar
adjustment at atmospheric
pressure
Switching function TTR90-S
Setting range
with potentiometer
≈2×10
-3
… 500 mbar
(≈2 rotations per pressure
decade)
Hysteresis
≈30% of reading
Relay contact
closed
open
60 V, 0.5 ADC, floating
at low pressure (LED lit)
at high pressure, error, no
supply
Supply
DANGER
The transmitter may only be connected to supply
and evaluation units that conform to the
requirements of a grounded protective extra-low
voltage (SELV-E according to EN 61010). The
connection to the transmitter has to be fused
1)
.
Supply voltage at transmitter
+14 … +32 VDC
(ripple ≤1 V
pp
)
Power consumption
≤1 W
Fuse required
1)
≤1 AT (slow)
Electrical connection FCC-68 socket, 8 poles,
with screening
Sensor cable 8 poles, plus shielding
Cable length
≤100 m (8×0.14 mm
2
)
Grounding concept
Vacuum connection
to signal common
Supply common
to signal common
→ "Electrical Connection"
connected via 10 kΩ
(voltage difference ≤±50 V)
conducted separately, for
differential measurement
Materials exposed to vacuum
Vacuum connection
Filament
Feedthrough
Baffle (only version
DN 16 ISO-KF)
Other materials
stainless steel
W
glass
stainless steel
Ni, Cu, NiFe
Internal volume
128 10, 128 20
128 11, 128 21
128 12, 128 22
128 13, 128 23
128 14, 128 24
≈2 cm
3
≈2 cm
3
≈10 cm
3
≈2 cm
3
≈2 cm
3
Admissible pressure
≤10 bar (absolute)
limited to inert gases
1)
Leybold Vakuum controllers fulfill these requirements.

Summary

Functional Principle

Functional Principle Description

Over the whole measurement range, the measuring signal is output as a logarithm of the pressure.

Safety Information

Safety Symbols

Symbols used: DANGER, WARNING, Caution, indicating different levels of risk.

General Safety Instructions

Adhere to applicable regulations and take necessary precautions for process media and work.

Liability and Warranty

Leybold Vakuum assumes no liability if end-user or third parties disregard instructions or modify the product.

Technical Data

Measurement Range

Specifies the measurement range for various gases like air, O2, CO, and N2.

Accuracy Specification

Details the accuracy of the measurement, approximately 10% of reading in the range of 1x10-3 to 100 mbar.

Output Signal

Describes the output signal as logarithmic, with a rate of 1.286 V/decade.

Switching Function TTR90-S

Details the setting range and hysteresis for the switching function on TTR90-S models.

Intended Use

Intended Application

The THERMOVAC Transmitters TTR90 and TTR90-S are designed for vacuum measurement of gases.

Electrical Connection

Pin Assignment

Details the function of each pin in the 8-pole FCC-68 plug for supply, signal, and switching contacts.

Sensor Cable Connection

Instructions for connecting the sensor cable to the transmitter and the controller.

Operation

Measuring Signal

Explains that the measuring signal is available between pins 3 and 5 and requires a stabilization period.

Gas Type Dependence

Notes that the measurement value is gas dependent and requires conversion for gases other than dry air.

Adjustment Procedures

Factory Calibration

The transmitter is factory calibrated, but zero adjustment may be needed due to drift or contamination.

Zero Adjustment

Instructions for adjusting the zero point at the normal operating temperature, checking seals if necessary.

Potentiometer Adjustment

Guides on adjusting the <HV> and <ATM> potentiometers for specific voltage or pressure values.

Switching Function TTR90-S Details

Setpoint Adjustment

Describes how to set the lower switching threshold using the <SETPOINT> potentiometer and button.

Malfunction Warning

Warns that pressing the <SETPOINT> button suppresses the measuring signal, potentially causing malfunctions.

Deinstallation Steps

System Venting

Procedure to vent the vacuum system with air to atmospheric pressure before deinstallation.

Component Handling Precautions

Cautionary notes on handling contaminated parts and dirt-sensitive areas during deinstallation.

Removal Procedure

Steps to turn off the transmitter, unplug the sensor cable, and remove it from the vacuum system.

Maintenance and Troubleshooting

Sensor Replacement

Indicates that the sensor can be replaced in case of severe contamination or malfunction.

Contamination Policy

Transmitter failures due to contamination are not covered by warranty; declarations are required for service.

Spare Parts

Ordering Information

Instructions to indicate product nameplate information and ordering number when ordering spare parts.

Product Return and Disposal

Returning the Product

Guidelines for returning products, emphasizing the need for a declaration of contamination for safety.

Disposal Precautions

Warnings regarding contaminated parts and substances detrimental to health and the environment during disposal.

Component Separation

Instructions to separate components after disassembly based on contamination and material type for proper disposal.

Declaration of Contamination

Declaration Form

Form for declaring product contamination, required for service, repair, and disposal.

Legally Binding Declaration

A declaration statement confirming information accuracy and assumption of costs associated with contaminated products.

Overview

1. Function Description
2. Important Technical Specifications
3. Usage Features
4. Maintenance Features

The Leybold THERMOVAC Transmitters TTR90 and TTR90-S are designed for vacuum measurement of gases within a pressure range of 5×10⁻⁴ to 1000 mbar. They operate on the principle of thermal conductance, similar to a Pirani gauge, and output a logarithmic signal of the pressure across their entire measurement range. These transmitters can be used with Leybold Vakuum controllers or other evaluation units.

Function Description

The transmitters measure pressure by sensing the thermal conductance of the gas, which changes with pressure. The output signal is a voltage that corresponds logarithmically to the pressure. The TTR90-S model includes a switching function, providing a potential-free relay contact that closes when the pressure falls below a set threshold. This threshold can be adjusted using a potentiometer.

Important Technical Specifications

• Measurement Range: 5×10⁻⁴ to 1000 mbar (for air, O₂, CO, N₂).
• Accuracy: Approximately ±10% of reading in the range of 1×10⁻³ to 100 mbar (outside this range up to a factor of 2).
• Repeatability: Approximately ±2% of the measured value in the range 1×10⁻³ to 100 mbar.
• Output Signal (Measuring Signal): 0 to +10.3 V. The measurement range is +1.9 V to +10.0 V, corresponding logarithmically to 1.286 V/decade.
• Error Signal: Less than 0.5 V (indicating filament rupture).
• Output Impedance: 2×10 Ω.
• Minimum Loaded Impedance: 10 kΩ, short circuit-proof.
• Response Time: Approximately 10 ms.
• Transmitter Identification: Resistance 27 kΩ referenced to supply common.
• Supply Voltage at Transmitter: +14 to +32 VDC (ripple ≤1 Vpp).
• Power Consumption: Less than 1 W.
• Fuse Required: ≤1 AT (slow).
• Admissible Temperatures:
  • Operation: +5 to +60 °C (for 128 10, 128 11, 128 13, 128 14, 128 20, 128 21, 128 23, 128 24).
  • Operation: +5 to +250 °C (for 128 12, 128 22).
  • Storage: -20 to +65 °C.
• Relative Humidity: Less than 80% at temperatures up to +31 °C, decreasing to 50% at +40 °C.
• Filament Temperature: 120 °C.
• Type of Protection: IP 40.
• Materials Exposed to Vacuum: Stainless steel (vacuum connection, baffle), W (filament), glass (feedthrough), Ni, Cu, NiFe (other materials).
• Internal Volume: Approximately 2 cm³ for most models, 10 cm³ for DN 16 CF-R versions.
• Admissible Pressure: ≤10 bar (absolute), limited to inert gases.

Usage Features

• Mounting Orientation: The transmitters can be mounted in any orientation. For optimal performance, especially to prevent condensates and particles from entering the measuring chamber, a horizontal to upright position is recommended, possibly with a seal and centering ring with a filter.
• Electrical Connection: The transmitter must be connected to supply and evaluation units that conform to grounded protective extra-low voltage (SELV-E) requirements (EN 61010). The connection to the transmitter must be fused. For KF connections, a conductive metallic clamping ring is required for proper grounding.
• Gas Type Dependence: The measurement value is gas-dependent. The pressure reading applies to dry air, O₂, CO, and N₂. For other gases (e.g., He, Ar, Xe, H₂, CO₂, water vapor, Freon 12), calibration factors must be applied.
• Adjustment: The transmitters are factory calibrated. However, a zero drift can occur due to long-term operation or contamination. Periodic checking and adjustment of the zero point are recommended. The zero adjustment must be performed at the ambient temperature at which the transmitter is normally operated, under vacuum (p << 10⁻⁴ mbar). Potentiometers for (high vacuum) and (atmospheric pressure) allow for fine-tuning.
• Switching Function (TTR90-S): The TTR90-S model features a built-in lower threshold that can be set in the range of ≈2×10⁻³ to 500 mbar using the potentiometer. The threshold can be raised by one pressure decade per two clockwise turns, with a hysteresis of approximately 30%.
• Safety Precautions:
  • DANGER: Overpressure in the vacuum system (>4 bar) can cause KF connections with elastomer seals to fail, leading to leaks and potential health hazards. Use O-rings with an outer centering ring.
  • DANGER: Incorrectly grounded products can be extremely hazardous. The transmitter must be electrically connected to the grounded vacuum chamber.
  • CAUTION: Dirt and damages impair function. Handle vacuum components with care, ensuring cleanliness.
  • CAUTION: Touching the product with bare hands increases desorption rate. Always wear clean, lint-free gloves and use clean tools.
  • DANGER (Switching Function): Pressing the button suppresses the measuring signal and outputs the lower threshold instead, which can lead to malfunctions if processes are controlled via the signal output. Only press the button when no damages can arise.

Maintenance Features

• Sensor Replacement: In cases of severe contamination or malfunction, the sensor can be replaced. Failures due to contamination are not covered by the warranty.
• Spare Parts: When ordering spare parts, provide all information from the product nameplate and the description/ordering number from the spare parts list.
• Returning Products: Contaminated products (e.g., radioactive, toxic, caustic, or microbiological hazard) can be detrimental to health and the environment. Products returned to Leybold Vakuum should be free of harmful substances. A duly completed declaration of contamination must be enclosed, adhering to forwarding regulations. Products not clearly declared as "free of harmful substances" will be decontaminated at the customer's expense or returned to the sender.
• Deinstallation:
  1. Vent the vacuum system to atmospheric pressure and wait at least 2 minutes.
  2. Turn off the transmitter.
  3. Unplug the sensor cable.
  4. Remove the transmitter from the vacuum system.
• Disposal: Contaminated parts must be decontaminated according to relevant national regulations and then separated by material for disposal. Other components should be separated by material and recycled. A declaration of contamination form must be completed for any service, repair, or disposal.

Leybold vacuum TTR90 Specifications

General

Brand	Leybold vacuum
Model	TTR90
Category	Transmitter
Language	English