4 Operation
Observe Safety Information 0.6.
4.1 Before Starting
Proceed with the following items before connecting the vacuum pump with
the power cable.
■
Check if the vacuum pump is in its position, and the adjustment feet are
fixed.
■
Turn on the cooling water flow, and check piping for water leaks.
■
Operate the pump with purge gas at all times.
For purge gas operations:
Check that the pressure regulator on the front panel is closed, i.e. the
pressure adjustment knob is fully counterclockwise. Turn on purge gas
supply. Adjust the pressure slowly to 1.5 bar (0.15 MPa), then lock the
knob. The manometer might be damaged while the purge gas supply
pressure is too large.
NOTICE
Fig. 4.1 CC-type pump’s main switches
ON
EMO
To Next Page
Loading...
