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MKS Baratron 622A - User Manual

MKS Baratron 622A
55 pages
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114492-P1
Rev F, 10/98
Instruction Manual
MKS Baratron
®
Type
622A/626A/627A/628A/629A
Absolute Pressure Transducers
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

Questions and Answers

  • R
    Robert HerreraAug 3, 2025
    What to do if MKS Transducer shows overrange signal?
    • M
      Matthew ParkerAug 3, 2025
      If your MKS Transducer shows an overrange positive or negative signal, it might be due to a shorted transducer or a damaged cable connecting the transducer to the electronics module. Check the supply voltages at the terminal block. Carefully examine the cable and transducer for any signs of damage. If you find any issues, replace the affected components.
  • M
    Marie VangAug 12, 2025
    Why MKS Baratron 622A has unstable zero output?
    • J
      Jason HernandezAug 12, 2025
      An unstable zero output in your MKS Transducer might be caused by ambient temperature issues. The temperature may be too high, or it may be varying too much. Make sure the ambient temperature is within the product requirements as specified in Appendix A: Product Specifications, page 41.
  • R
    Rodney TaylorAug 22, 2025
    What to do if MKS Baratron 622A Transducer measurement slowly goes positive?
    • L
      Lance BeckerAug 23, 2025
      If the measurement from your MKS Transducer slowly increases over time, it could be due to overpressure or contamination buildup in the P x cavity. You should return the transducer to MKS for servicing or replacement.

Summary

WARRANTY

Special Notice on Fittings

Warns that using specific compression-type fittings voids the warranty due to potential sensor damage.

Pressure Transducer Safety Information

General Safety Procedures

Outlines essential safety guidelines for operation, maintenance, and environmental considerations for the instrument.

Chapter Two: Installation

Setup

Guidance on mounting the transducer, isolating it from vibration, and initial system configuration.

Checking the Transducer Zero

Procedures for verifying and setting the transducer's zero point, including warm-up time requirements.

Coarse Zero Adjustment

Details the process and purpose of the coarse zero adjustment feature for enhanced zero range capability.

Electrical Information

Specifies power supply requirements, noise/ripple limits, and grounding scheme recommendations.

Chapter Four: Operation

How to Use the External Zero on the Type 629 Unit

Details using the external zero pin on the Type 629 for common-mode rejection and zero adjustment.

Chapter Five: Maintenance and Troubleshooting

Zero Adjustment

Instructions for performing initial and periodic zero adjustments to ensure measurement accuracy.

Troubleshooting Chart

A guide to diagnose common issues, identify causes, and find solutions for transducer problems.

Appendix A: Product Specifications

MKS Baratron 622A Specifications

General IconGeneral
TypeCapacitance Manometer
Output Signal0-10 VDC
F.S. Output10 VDC
Pressure Range0 to 1000 Torr
Temperature Range0 to 50 °C
Electrical ConnectionD-sub connector
Operating Temperature0 to 50 °C
Materials Exposed to ProcessAlumina ceramic

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