MKS HPS 937A Series User Manual

HPS
TM
Series 937A
High Vacuum
Multi-Sensor System
OPERATION AND
MAINTENANCE MANUAL

MKS HPS 937A Series Specifications

General

Category	Accessories
Type	Power Supply
Operating Temperature	0 to 50 °C
Output Voltage	24 VDC
Cooling Method	Convection
Compatible Pressure Sensors	MKS Baratron Capacitance Manometers
Protection Features	Overcurrent, overvoltage

Summary

Safety Information

Symbol Definitions

Definition of Symbols Found on the Unit

Details symbols found on the device itself.

Safety Precautions

Safety Procedures and Precautions (English)

Outlines general safety measures for instrument operation.

Specifications*

Controller Specifications

Details specifications for the controller unit.

Analog Outputs

Front Panel Controls

Sensor Modules

Sensors

Sensor Types and Pressure Ranges

Lists sensor types and their respective pressure measurement ranges.

Feature and Control Locations

Front Panel Controls and Indicators

Identifies controls and indicators on the front panel.

Rear Panel Connectors

Identifies connectors and ports on the rear panel.

Set Points

Leak Test Mode

Analog Output Signals

Setting Up the Series 937A Controller

Removing a Module

Steps to safely remove a controller module.

Configuring Sensor Modules

Instructions for installing and configuring sensor modules.

Analog Module Configuration

Power Supply Module

Installing a Module

Steps for correctly installing a module into the controller.

Using Function Select

Reviewing Controller Setup

Cold Cathode non-Standard Configuration Codes

Pressure Mode

Cold Cathode Sensor High Voltage

Relay Set Points Mode

Reading a Relay Set Point

Setting a Relay Set Point

Protection and Control Set Points Mode

Setting a Protection Set Point

Setting a Control Set Point

Zero and ATM Calibration Modes

Factory Calibration Procedure

User Calibration Procedure

Capacitance Manometer Auto-Zero Feature

ATM Calibration Mode

Calibrating the Convection Pirani Sensor for Atmosphere

Cold Cathode Operation

Cold Cathode Control Methods

Using Protection and Control Set Points

Determining Protection and Control Set Points

Controller Analog Output

Buffered Output

Logarithmic Output

Combination Logarithmic Output

Error Messages

Setup Error Detection

Appendix A: Installing a Series 937A Sensor

Cold Cathode Sensors: Installation

General information on installing cold cathode sensors.

Managing Contamination in Cold Cathode Sensors

Series 423 I-MAG® Cold Cathode Sensor

Connecting and Disassembling the I-MAG Sensor

Series 421 Cold Cathode Sensor

Connecting and Disassembling the Series 421 Sensor

Pirani Sensors: General and Location

Pirani Sensor General Information

Series 315/345 Pirani Sensor

Sensor Orientation and Connection

Series 317 Convection Pirani Sensor

Connecting the Series 317 Convection Pirani Sensor

Capacitance Manometer MKS Baratron®

General, Installation, and Connection

Overview, installation, and connection of Baratron manometers.

Thermocouple Sensor: DV-6M

General, Orientation, and Connection

Overview, orientation, and connection for DV-6M sensors.

Appendix B: Leak Testing with the Series 937A

Appendix C: 937A Sensor Output vs. Pressure Curves

Buffered Analog Output Cold Cathode

Buffered Analog Output Pirani

Buffered Analog Output Convection Pirani

Buffered Analog Output Capacitance Manometer

Buffered Analog Output Thermocouple

Logarithmic and Combination Output All Sensors