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Plasma I-BEAM RF Series - User Manual

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I-BEAM RF POWER SUPPLY
MANUAL
ESTABLISHED 2003

Table of Contents

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Summary

I-BEAM RF Power Supply Manual

Safety Information

Hazard Warnings and Compliance

Covers voltage warnings, code compliance, interlocks, and CE certification.

Service and Technical Support

Contacting Support and Warranty

Provides contact information, required data for support, and warranty terms.

Warning Statements

Hazard Symbol Explanations

Explains the meaning of ALERT, WARNING, and CAUTION symbols used in the manual.

Chapter 1: Getting Started

Introduction to Ion Beam Technology

Discusses the origin and applications of ion beam technology.

Source Components and Operation Overview

Covers key terms, components, and basic operational principles of the ion source.

Chapter 2: Installation

General Requirements and Safety

Outlines vacuum, electrical, grounding, and safety considerations for installation.

Unpacking and Physical Installation

Details unpacking, rack mounting, air cooling, and connection layout.

Electrical Connections and Interfaces

Covers source/RFN cables, communication ports, interlocks, and legacy interfaces.

Preflight Checks and Input Power

Covers connection verification, input power requirements, and status indicators.

Chapter 3: Specifications

I-BEAM RF Series Specifications

Lists source types, beam parameters, and power supply configurations.

Chapter 4: Operation

Front Panel Overview and Power On

Describes the front panel layout, indicators, and the power-on sequence.

Operational Modes: Manual, Local, Remote

Explains the three primary modes of operation and their respective uses.

Parameter Adjustment and Control

Details using the keypad, control keys, memory storage, and parameter ranges.

Operation Examples and Sequences

Provides step-by-step examples, ON/OFF control, and quick start procedures.

Chapter 5: Remote Control

Remote Control Modes and RS232 Communication

Introduces remote control options and RS232 communication setup.

RS232 Commands and Operation

Covers RS232 command reference, details, and operation examples.

Remote Switch Control and Pinouts

Details how to use remote switches and their connection pinouts.

Chapter 6: Troubleshooting

Troubleshooting Overview and Common Issues

Introduces the troubleshooting structure and lists common problems.

Power Supply Error Codes

Details specific error codes, their descriptions, and possible solutions.

RF Neutralizer and Source;Beam Troubleshooting

Covers RFN, source startup, beam issues, and general error diagnosis.

Additional Troubleshooting Resources

Refers to other manuals and contact information for further assistance.

Appendix A: Legacy Installation

Legacy System Integration and IBOX Kit

Explains integration with older systems and lists IBOX kit components.

Installation Location and Wiring Diagrams

Shows installation location and provides wiring diagrams for legacy systems.

IBOX Pin Outs and Connections

Details pinouts for USER INTERFACE, USER COM, and GFC ports on the IBOX.

Appendix B: Match Network Tuning

Match Network Components and Setup

Defines the matching network, insulators, controller, and initial setup procedures.

Match Network Tuning Procedure

Details the steps for tuning the LOAD and TUNE capacitors and setting presets.

Plasma I-BEAM RF Series Specifications

General IconGeneral
BrandPlasma
ModelI-BEAM RF Series
CategoryPower Supply
LanguageEnglish