www.Siargo.com Mass flow controller MFC3000 User Manual
Gas Mass Flow Controller
with proprietary MEMS flow sensing and IO-Link
MFC3000 Series
User Manual
Document No. 03-2022-MFC1 EN
Issue date: 2022.03
Revision: VA.1
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, CA 95054
USA
Tel: +1(408)969.0368
Email: info@siargo.com
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Copyright 2022 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descripti
without prior notice. For further information and updates, please visit: www.Siargo.com
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