Siargo MFC3000 Series - Table of Contents

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www.Siargo.com Mass flow controller MFC3000 User Manual
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Table of Contents
1. Overview .................................................................................................. 4
2. Receipt / unpack of the products ................................................................ 5
3. Knowing the products ............................................................................... 6
3.1.
Product description
................................................................................................... 6
3.2. Power and data cable description ............................................................................... 6
3.3. Mechanical dimensions .............................................................................................. 7
4. Installation ............................................................................................... 8
5. Operation ................................................................................................. 9
5.1 Check the product specifications ................................................................................ 9
5.2 Check the leakage ..................................................................................................... 9
5.3 Power the product and digital data connection ........................................................... 9
5.4 IO-Link communication ........................................................................................... 10
6. Product selection ..................................................................................... 13
7. Techn
ical specifications
............................................................................ 14
8. Technical notes for the product performance ............................................. 15
8.1 Measurement principle ............................................................................................ 15
8.2 Precautions for the best performance of the product ................................................. 15
8.2.1 Comparison with a third-party reference meter ................................................... 15
8.2.2 Particle contamination and fluidic cleanness ....................................................... 16
8.2.3 Apply to a different gas medium ......................................................................... 16
9. Troubleshooting ...................................................................................... 17
10. Warranty and Liability ............................................................................. 18
11. Service/order contact and other information .............................................. 20
Appendix: Document history
......................................................................... 21