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SPS Polos SPIN150i infinite - User Manual

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Polos
SPIN150i/200i
infinite
for software rev. 1.11
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Summary

General Information

Safety Instructions

Guidelines for safe operation and handling.

Liability

Manufacturer's disclaimer regarding product use and damages.

Edition

Details about the document revision and publication date.

Warranty

Conditions under which the equipment warranty is void.

Service Address

Contact information for technical support and service.

Safety Instruction

Intended Use

Specifies the allowed applications for the Polos spin processor.

General Safety Instruction

General safety rules and warnings to ensure safe operation.

Symbols Used on System

Explains safety symbols found on the equipment for hazard identification.

Personnel Training

Requirements for operator training and qualifications for system utilization.

Personnel Obligations

Responsibilities of personnel operating the system regarding safety.

Personal Protection Equipment

Specifies necessary protective gear for operators handling chemicals.

Specific Safety Instruction

System Safety Alarms

Describes safety alarms and indicators on the system for user awareness.

Safety Devices

Lists and explains the integrated safety features of the unit.

Specific Threads to the System

Discusses specific hazards related to system operations and components.

System Hazards

General hazards associated with the system's operation, including mechanical and electrical risks.

System Restore After Emergencies

Procedures for safely restoring the system after an emergency stop event.

First Aid in Emergency

Guidelines for providing immediate first aid in emergency situations.

Transportation and Storage

Safety Indication

Safety warnings related to transport and storage operations.

Transportation

Guidelines and precautions for safely transporting the unit.

Storage

Recommended environmental conditions for storing the spin processor.

Product Description

Package Content

Lists the items included in the product packaging for verification.

System Overview

Detailed description of the system's components and their layout.

Media Connections Overview

Details on the system's input/output connections for media and power.

Installation and Commissioning

Safety Information

General safety precautions and warnings during installation and commissioning.

Unpacking

Procedures for safely unpacking the equipment and checking for damages.

Installation Site

Recommended environment and conditions for optimal system installation.

Installation Procedure

Step-by-step guide for correctly installing the system.

Positioning

Guidance on placing the unit in its operational location for safety and access.

Assembling

Information on system assembly if required prior to use.

Connect Drain Line (Optional)

Instructions for connecting the optional drain line for chemical processes.

Connecting Medias

How to connect various media supplies like vacuum and gas to the system.

Connecting to Power Supply

Instructions for connecting the unit to electrical power safely.

Operation

Safety Indication

Safety warnings and precautions to be observed during operation.

Preparations

Steps to take before operating the system, including connections.

Powering On

Procedure for safely turning on the unit and initiating the system.

Open the Lid

Instructions for opening the system's lid for access to the chamber.

Insert or Change the Chuck

Guide for safely inserting or replacing the spin chuck.

Loading a Substrate

Instructions for correctly placing a substrate onto the chuck.

Creating a Recipe

How to create new processing recipes using the system software.

Starting a Recipe

Procedure for running a selected recipe on the spin processor.

Switching Off

Steps for safely powering down the unit after operation.

Software Instruction

Start Screen

Description of the initial software screen upon unit startup.

Home Screen

Overview of the main software interface and navigation options.

Open a Folder

How to access recipes organized within folders on the system.

Move a Recipe or a Folder

Instructions for reorganizing recipes and folders within the software.

Interchange the Place of 2 Recipes

How to swap the positions of two recipes in the software interface.

Execute a Recipe

Detailed steps for running a processing recipe on the spin processor.

Abort a Recipe

How to stop a running recipe prematurely and safely.

Suspend a Recipe

How to pause a running recipe and resume it later.

End of Cycle

How to manually end the current cycle or recipe execution.

Select Different Step

How to choose and execute a specific step within a recipe.

Log File

Accessing and interpreting system event logs for troubleshooting.

Create and Edit a Recipe

Comprehensive guide to creating, editing, and saving recipes.

Touch- Keyboard

Instructions for using the on-screen keyboard for data input.

Edit the Header

Modifying the header information, name, and icon of a recipe.

Edit a Step

Adjusting parameters for individual steps within a recipe.

Spin Parameters

Configuration settings related to the spinning process, speed, and direction.

Dispensing Parameters

Configuration settings for chemical dispensing operations.

Save as...

How to save recipes with new names or in different folders.

Search a Recipe

Finding saved recipes within the system database.

Delete a Folder and its Contents

Procedure for removing folders and their associated recipes.

Backup Recipes to an Archive File

How to create backups of recipes onto an external archive.

Restore Recipes from an Archive File

How to load recipe backups from an archive file.

System Parameters

How to configure and modify system-wide settings and parameters.

Information Screen

Accessing details about the unit's software version and hardware information.

Maintenance and Cleaning

Maintenance

General maintenance tasks for the spin processor to ensure longevity.

Cleaning

Detailed instructions for cleaning the unit's components and chamber.

Decommissioning, Storage and Disposal

Decommissioning

Steps to prepare the system for storage or disposal according to procedure.

Storage

Recommended environmental conditions for long-term storage of the unit.

Disposal of the System

Guidelines for environmentally sound system disposal at its end-of-life.

Disposal of Chemicals

Procedures for the proper disposal of process and cleaning chemicals.

Technical Data

Materials Specifications

Information on materials used in the system's construction and components.

Dimensions

Physical dimensions of the spin processor unit.

Facility Requirements

Utilities, environmental conditions, and connections needed for operation.

Chemicals

Information regarding chemicals used with the system and handling precautions.

Noise Emission

Specification of the unit's noise level during operation.

Applicable Directive

List of EU directives the product complies with for safety and EMC.

Available Chuck

Family Types

Classification of chuck types based on their design and application.

Materials

Information on materials used in the construction of available chucks.

Preset Recipe

System Parameters

Password List

List of passwords required to access different system parameter levels.

Dimensioned Drawings

Contacts

SPS Polos SPIN150i infinite Specifications

General IconGeneral
BrandSPS
ModelPolos SPIN150i infinite
CategoryLaboratory Equipment
LanguageEnglish

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