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TVP Manual (full) March 2007 CE rev 03.doc
Note
The system uses highly stable PT100 sensors, the temperature measurement system is
designed for long-term reliability and stability of temperature measurement. Inferring vacuum
performance from the CI/CO values is an unreliable method of process determination. Direct
measurement and observation of the vacuum through either an RGA or Penning type gauge
are the only reliable methods of evaluating the actual process conditions present. The actual
vacuum relates to the sum of the partial pressures of which water accounts typically 90-98%
within a vacuum system. For further information regarding the vapour pumping of water
consult Section 4 vacuum data.