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Charles RobersonJul 29, 2025
Why is the temperature too low in my Tempress Systems TS-6303?
- HharveyanthonyJul 29, 2025
The temperature in your Tempress Systems Furnace might be too low due to a SCR or fuse being out of order, or a power failure.
Why is the temperature too low in my Tempress Systems TS-6303?
The temperature in your Tempress Systems Furnace might be too low due to a SCR or fuse being out of order, or a power failure.
General| Brand | Tempress Systems |
|---|---|
| Model | TS-6303 |
| Category | Furnace |
| Language | English |
Outlines the manual's purpose for installing, adjusting, operating, and maintaining Tempress Furnaces.
Lists Tempress Diffusion models with wafer size, tube count, and flat-zone length.
Explains the furnace's design for Diffusion/Atmospheric and LPCVD processing, cleanroom compatibility, and construction.
Lists major furnace components like cabinet, scavenger, cooling unit, heating elements, etc.
Details the furnace cabinet's construction and optional features like over-temperature protection.
Describes the toxic gas scavenger, its available models, and general features.
Explains the water/air heat exchanger cooling module, its components, and operation.
Details the blower-assisted cooling process, airflow direction, and heat exchanger usage.
Covers the types, features, and advantages of standard Tempress Systems heating elements.
Describes the module using Fibrothal heating elements, its advantages like temperature equability.
Discusses Kanthal elements, isolation material, and safety precautions regarding dust.
Explains tube support, centering by adapters, and radiation heat shields.
Details the Digital Temperature Controller, zone control, thermocouples, and flatzone.
Introduces the chapter on unpacking, installation, and inspection procedures with safety notes.
Provides detailed steps for unpacking, inspection, and handling of the furnace.
Details furnace placement, leveling, and alignment of related components.
Instructions for connecting the scavenger exhaust duct and relevant regulations.
Outlines pre-operation checks, ensuring switches are off, correct voltage, and proper cabling.
Prepares for start-up after installation, defining chapter contents and operator responsibility.
Lists materials required and initial steps for actual furnace start-up, including TC connection.
Explains adjusting manifold pressure for valve movement during fast cooldown.
Details the necessary oxidation treatment for heating elements to protect and extend their lifetime.
Provides step-by-step instructions for unpacking, cleaning, and installing the quartz tube.
Refers to the Technical Manual DTC, chapter 4.0 for test and calibration procedures.
Details pre-cleaning procedures for quartz and SiC process tubes.
Describes the procedure for removing glasses, dopants, or oxide from process tubes.
Details conservative and aggressive methods for removing Si3N4 from process tubes.
Explains conservative and aggressive methods for removing Polysilicon residue.
Explains the automatic profiling run, relation between temperatures and power output.
Defines desired temperatures in the Profile Temperature Table and its columns.
Details the profiling recipe setup steps: LOAD/UNLOAD, BOATOUT, LOAD WAFERS.
Covers steps like BOAT IN, STABILIZE, PROFILING, COOLDOWN, STANDBY for recipe execution.
Waits for operator to unload wafers and allows selection of a new process recipe.
Explains the preparation procedure for automatic profiling.
Guides the installation and connection of paddle thermocouples for profiling.
Details selecting and editing profile temperatures into the Profile Temperature Table.
Outlines the steps to execute the automatic profiling run.
Summarizes the automatic profiling process, including data logging and comparison.
States that maintenance is minimal, required only for part failure, and describes part replacement.
Details the procedure for replacing a heating element, including safety and post-installation steps.
Explains how to adjust the heating element's position for proper fit and operation.
Describes the procedure for removing and installing heating elements, including safety checks.
Provides a step-by-step guide for replacing the SCR-Module.
Covers replacement of the heat exchanger and fanplate, including fitting precautions.
Gives instructions for changing quartz process tubes and associated precautions.
Details the procedure for changing LPCVD and vacuum system tubes.
Lists daily, monthly, and yearly maintenance tasks for the furnace.
Calibrates spikes with paddle thermocouples for automatic profiling, referencing DTC manual.
Guides PID adjustment for furnace temperature stability, referencing DTC manual.
Details adjustment of the Excess Temperature controller setpoint to process temperature.
Lists potential causes and solutions for excess temperature alarms in the furnace.
Provides causes and solutions for audible alarms (buzzer) from the furnace system.
Identifies causes like SCR failure or power loss for low temperature issues.
Lists causes for controller alarms like thermocouple breaks or incorrect programming.