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Warren RodriguezAug 3, 2025
Why is the temperature too low in my Tempress Systems Furnace?
- Aapril63Aug 3, 2025
The temperature in your Tempress Systems Furnace might be too low due to a SCR or fuse being out of order, or a power failure.
Why is the temperature too low in my Tempress Systems Furnace?
The temperature in your Tempress Systems Furnace might be too low due to a SCR or fuse being out of order, or a power failure.
Describes the scope, purpose, and intended audience of the manual for furnace operation.
Lists and details various Tempress diffusion furnace models, including their specifications and capabilities.
Explains the overall diffusion system, its function, and its main components for processing wafers.
Enumerates and briefly describes the key components that constitute the furnace system.
Details the construction of the furnace cabinet, including material and optional features like over-temperature protection.
Describes the toxic gas scavenger system, its available models, and its function in exhaust management.
Explains the cooling module, a water/air heat exchanger, and its role in dissipating heat from the furnace.
Details the fast cooldown process, utilizing a blower and heat exchanger for rapid temperature reduction.
Covers the furnace's heating elements, their types, specifications, and the benefits they provide.
Describes the tube heating module, its construction with Kanthal alloys, and its advantages for diffusion furnaces.
Discusses heating elements, adapters, and collars, including material properties and critical safety precautions.
Explains the mechanisms for supporting tubes, centering them with adapters, and sealing the system.
Details the digital temperature controller, its PID functions, and the thermocouple systems used for precise temperature management.
Introduces the chapter covering unpacking, installation, and inspection procedures for the furnace.
Provides essential steps and cautions for safely unpacking the furnace system upon arrival.
Outlines the procedures for physically installing the furnace assembly, loadstation, and gas cabinet.
Covers critical aspects of furnace placement, leveling, and alignment with associated equipment.
Addresses the installation of the scavenger exhaust duct, emphasizing regulatory compliance for gas handling.
Specifies pre-operation checks to ensure all components are secure, connections are correct, and safety measures are in place.
Introduces the start-up sequence, noting it begins after correct installation and leveling of the furnace.
Lists necessary materials and details the step-by-step procedure for starting up the furnace system.
Explains how to adjust manifold pressure for smooth valve operation during the fast cooldown process.
Guides the essential oxidation treatment for heating elements to ensure longevity and performance.
Provides a detailed, step-by-step guide for correctly installing the quartz tube into the furnace.
Refers to the DTC-Technical Manual for specific procedures related to testing and calibrating the system.
Offers procedures for thoroughly cleaning quartz and SiC process tubes before installation.
Explains the Amtech/Tempress standard procedure for automatic profiling to optimize temperature control.
Introduces profiling by defining desired temperatures, profile tables, and the relationship between TCs and power output.
Details the critical steps involved in setting up and selecting specific profiling recipes for the furnace.
Guides the correct installation and functional check of paddle thermocouples for accurate profiling.
Explains how to edit and select profile temperatures within the Profile Temperature Table for custom recipes.
Outlines the sequence for executing an automatic profiling run, from recipe selection to wafer unloading.
Summarizes the automatic profiling process, including data analysis and frequency adjustments for optimal results.
Introduces the maintenance chapter, emphasizing that maintenance is minimal and only required for part failures.
Provides a comprehensive, step-by-step procedure for safely replacing a faulty heating element coil.
Details the process for removing and installing heating elements, including crucial adjustments and startup steps.
Outlines the procedure for safely replacing the SCR-Module, including power disconnection and component handling.
Explains the procedure for replacing a leaking or clogged heat exchanger and checking fan operation.
Gives essential instructions and safety precautions for handling quartz tubes during routine changes.
Details the procedure for exchanging diffusion system tubes based on deposition buildup criteria.
Outlines the specific steps for changing LPCVD and vacuum system tubes, including cleaning and leak testing.
Lists specific daily, monthly, and yearly tasks for preventive maintenance to ensure system reliability.
Covers the calibration of thermocouples and adjustments to PID settings for optimal temperature stability.
Provides a guide to common furnace problems, their potential causes, and recommended solutions for efficient troubleshooting.
General| Configuration | Vertical |
|---|---|
| Wafer Size | Up to 200mm |
| Process Types | Oxidation, Annealing, Diffusion |
| Process Gases | O2, N2, Ar |
| Cooling Method | Forced air |