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Warren RodriguezAug 3, 2025
Why is the temperature too low in my Tempress Systems Furnace?
- Aapril63Aug 3, 2025
The temperature in your Tempress Systems Furnace might be too low due to a SCR or fuse being out of order, or a power failure.
Why is the temperature too low in my Tempress Systems Furnace?
The temperature in your Tempress Systems Furnace might be too low due to a SCR or fuse being out of order, or a power failure.
Configuration | Vertical |
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Wafer Size | Up to 200mm |
Process Types | Oxidation, Annealing, Diffusion |
Process Gases | O2, N2, Ar |
Cooling Method | Forced air |