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Tempress Systems TS-8603 User Manual

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44 pages
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Furnace Reference Manual
Tempress Systems Inc.
Furnace manual
M320_01 January 2004

Table of Contents

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Tempress Systems TS-8603 Specifications

General IconGeneral
ConfigurationVertical
Wafer SizeUp to 200mm
Process TypesOxidation, Annealing, Diffusion
Process GasesO2, N2, Ar
Cooling MethodForced air

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