MAINTENANCE
5.6 Tube change
CAUTION
Use cleanroom gloves for handling quartz.
CAUTION
No special directions are necessary to remove process
tubes. However, after every tube change, if a gap exists
between the process tube and the adapter, it must be
repacked with fiberfax wool This will prevent air
movement within the furnace and resultant temperature
cycling.
CAUTION
Use only cleaned quartz tube, paddle and cleaned profile
TC.
5.7 Tube change diffusion system tubes
The tube exchange is required at the moment there has been a deposition of approx. 20
microns. This however is strongly depending on the particle additions at processing. In case
the particles exceed the specifications the tube should be exchanged.
At every tube change the following has to be done:
1. Cool the system down to room temperature.
2. Remove the cantilever paddle. Must be cleaned.
3. Open the door to the heating element and pull the Thermocouples 5 cm out.
4. Take the Profiling TC out of the tube. Must be cleaned.
5. Remove the external torch if applicable. (See External Torch Manual)
6. Remove the tube adapters and the insulating endcap and stainless steel radiation shield.
7. Pull the process tube gently, 2 engineers should be present to guide the tube, and assure
it does not scratch.
To place the tube back in the system use the reverse procedure.
FURNACE REFERENCE MANUAL
5-5
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