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Tescan MIRA3 - User Manual

Tescan MIRA3
49 pages
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Summary

Safety Information

Installation and Microscope Repairs

Installation Instructions

Steps and requirements for professional installation of the microscope.

Instrument Repair and Spare Parts Usage

Guidelines on using original spare parts and authorized repair services.

Vacuum Modes

Low Vacuum Mode

Procedure for imaging non-conductive samples in low vacuum using the LVSTD detector.

Detectors

In-Beam SE Detector

Details the In-Beam SE detector for improved resolution at short working distances.

Getting Started

Microscope Starting

Instructions on logging into the MiraTC software and initializing the microscope.

Specimen Exchange

Detailed procedure for safely exchanging specimens in the microscope chamber.

Imaging in Low Vacuum Mode

Procedure for imaging non-conductive samples in low vacuum using the LVSTD detector.

Images at High Magnification

Steps for achieving the best resolution using high accelerating voltage and short working distance.

Tescan MIRA3 Specifications

General IconGeneral
TypeScanning Electron Microscope (SEM)
Electron SourceSchottky field emission gun
Resolution1.0 nm
Resolution (SE)1.0 nm
Resolution (BSE)2.5 nm
Accelerating Voltage200 V - 30 kV
DetectorsSE, BSE, EDS, WDS
Vacuum SystemTurbo-molecular pump
Beam Current1 pA - 200 nA