This document provides an instruction manual for the TOYOTA IPUP T100L and EC100L dry vacuum pumps, designed for semiconductor equipment. These pumps are suitable for loadlock, transfer chamber, and other clean processes.
Function Description
The IPUP T100L and EC100L are roots-type vacuum pumps that operate by rotating a pair of synchronized timing gears. They are driven by a 3-phase induction motor. The bearings and gears on the high-pressure side are lubricated with fluoric-type oil, and shaft seals do not require nitrogen. Ceramic balls are used in the bearings on the low-pressure side, lubricated with fluoric-type grease. Both the pump and motor are equipped with an indirect cooling system.
The pumps are designed as built-in components for APPLIED MATERIALS equipment and are controlled via the APPLIED MATERIALS SPI interface. They can be operated by the equipment through the SPI interface, which also allows for monitoring of pump status.
Control Capabilities:
- Starting and stopping of the pump.
- Monitoring of dry contact output status (DC24V, 0.2A).
- Control of pump revolution.
- External monitoring output for a monitoring system (optional).
Operation Modes:
The pump supports two operation modes:
- Remote mode: Controlled using the SPI of APPLIED MATERIALS. In this mode, actions such as run/stop, pump status monitoring, and rotational speed changes are possible.
- Local mode: Controlled using a hand-held controller. This mode allows for run/stop, settings adjustments, checking alarm logs, buzzer stop, alarm reset, and rotational speed changes.
Start and Stop Procedures:
- Start: The motor begins operation, inputs from sensors are processed, and Total RunHours and Power Consumption counts start.
- Stop: The motor stops operation (slow stop), and data counting ceases. During stopping, the hand-held controller LED lights intermittently.
Important Technical Specifications
Dimensions and Weight:
- Dimensions (LxHxW): 590 × 300 × 280 mm for both IPUP T100L and EC100L.
- Weight:
- IPUP T100L: 105 kg
- EC100L: 104 kg
Performance (at Default rpm setting):
- Maximum Revolution:
- IPUP T100L: 5250 r/min
- EC100L: 4650 r/min
- Peak Pumping Speed: 100 m³/h (1670 l/min) for both models.
- Ultimate Pressure: 1.2 Pa (0.009 Torr) for both models.
- Power Consumption (at ultimate pressure):
- IPUP T100L: 1.3 kW
- EC100L: 0.55 kW
- Maximum Continuous Inlet Pressure: 6.67 × 10⁻³ MPa (50 Torr) for both models.
- Noise Level (at ultimate pressure): <55 dB(A) for both models.
- Lubricant Quantity: 110 cm³ (pre-adjusted at factory, not to be changed).
Flanges:
- Inlet Flange: NW50
- Exhaust Flange: NW25
Environment:
- Ambient Temperature: 15 to 30 °C
- Humidity: Max 90% (no condensation)
- Pollution Degree: 2
- Installation Category: II
Cooling Water Specifications:
- Type: Non-corrosive industrial water or treated soft water (meeting Japan Refrigeration and Air Conditioning Industry Association standards).
- Flow Rate: Min. 1.5 L/min
- Supply Pressure: 300 - 700 kPaG (3.0 - 7.0 bar)
- Pressure Difference (inlet and outlet): 0.2 MPa or more
- Temperature: 10 - 25 °C
- Particle Size: 0.03 mm² or less
- pH Value: 6.0 - 8.0
- Electric Conductivity: 500 μΩ⁻¹/cm or less
- Chlorine Ion (Cl⁻): 80 ppm or less
- Sulfate Ion (SO₄²⁻): 200 ppm or less
- All Iron (Fe): 0.3 ppm or less
- M Alkalinity (CaCO₃): 75 ppm or less
- Total Hardness (CaCO₃): 120 ppm or less
- Sulfur Ion (S²⁻): None
- Ammonium Ion (NH₄⁺): None
- Silica (SiO₂): 50 ppm or less
- Manganese: 0.2 ppm or less
Power Supply:
- Number of Phases: 3
- Input Voltage: 208V (Voltage tolerance ±10%)
- Frequency: 50/60 Hz
- Rated Current: 12A
- Max. Power Capacity: 4.6 kVA
- Cable Outside Diameter: AWG14/4, UL Style 2587/2501
- Conductor Diameter: 2.08 mm² and over
- Conductor Material: Copper
Safety Sensors:
The pumps are equipped with safety sensors for:
- Overload protection (circuit protector, converter).
- Pump body over-temperature (thermistor).
- Motor over-temperature (temperature switches).
Usage Features
Low Power Consumption:
- IPUP T100L V3.4: 1.3 kW
- EC100L V2.1: 0.55 kW (58% reduced power consumption compared to IPUP T100L V3.4), contributing to global ecology and reduced running costs.
Automatic Restart:
- IPUP T100L V3.4 and EC100L V2.1 feature automatic restart in case of a 1-second power loss, preventing system downtime.
RoHS Compliance:
- Both IPUP T100L V3.4 and EC100L V2.1 are RoHS compliant.
Installation Flexibility:
- Can be installed horizontally.
- Two pumps can be vertically stacked using stacking brackets and M8 stacking bolts.
- Adjusters are provided for precise positioning and leveling.
- Fixation methods are available for securing the pump to equipment or the floor using brackets.
Control Interfaces:
- SPI Connector: Located on the rear panel, used for remote control and monitoring.
- Hand-held Controller: Connects to the KEYBOARD port on the front panel for local control, setting adjustments, and alarm log checks.
- RS232C Connector: Located on the rear panel for pump monitoring systems (optional).
Operation Condition Setting:
- Pump Rotation Speed: Adjustable via the hand-held controller (IPUP T100L: 1000-5250 rpm; EC100L: 1000-4650 rpm). This affects ultimate pressure, pumping speed, and power consumption.
- Maintenance Warning Time: Adjustable via the hand-held controller (default 18,000 hours, range 0-300,000 hours). Setting to 0 disables the warning.
- Temperature Indication Unit: Can be set to °C or °F.
- Buzzer: Can be turned ON or OFF for alarm (warning or hazard) notifications.
- Communication Method: External monitoring output can be changed from RS232C to RS485 (for Dry Pump Monitoring System option).
- Monitoring ID: Used for Dry Pump Monitoring System (option).
Safety Precautions:
- The pump must be installed horizontally, with an inclination angle within 2 degrees of horizontal.
- Must be fixed firmly to the floor or equipment using earthquake protection.
- Do not use in processes with corrosive, explosive, poisonous, or flammable gases.
- Requires a 15 A max main circuit breaker from the process tool.
- An EMO unit must be installed within 10 ft travel from the pump.
- Wait 30 seconds after turning off power before turning it on again to allow DC capacitor discharge.
- Do not move the pump while running.
- Wear protective gear when working on internal parts, as they can be hot (70°C or more).
- The oil level is factory-adjusted and should not be changed.
- Use shielded communication cables to prevent noise-induced malfunctions.
- Warning labels are present for hazardous voltage, heavy object, hot surfaces, and moving parts.
Maintenance Features
Overhaul Maintenance Intervals:
- Default setting for overhaul maintenance is 18,000 hours.
- The system automatically notifies the operator with a WARNING when this time expires.
- When the "Total Run Hour" exceeds the "Maintenance Time," the pump should be returned to TOYOTA INDUSTRIES CORPORATION for overhaul.
Pump Removal & Return Procedure:
- Only qualified, well-trained personnel should perform pump removal.
- Requires turning off and locking out the circuit breaker supplying power.
- All facility connections must be disconnected.
- Inlet and outlet flanges must be sealed with o-rings, blank caps, and clamps/bolts.
- An "Application Form for Pump Return" must be completed, including chemical information for any substances the pump was exposed to.
- The pump must be transported without inclining it more than 10 degrees from horizontal.
Pump Disposal:
- If disposing of the pump or by-products, decontamination must comply with local regulations.
- Contact a service representative for questions regarding part disposal.
Alarm Log:
- The pump saves the last 30 warning and hazard events in its memory, which can be checked via the hand-held controller to investigate root causes of alarms.
Clock Updating:
- The pump clock can be adjusted to ensure correct maintenance scheduling and alarm logging.
Integral Power Consumption:
- Electrical energy consumption can be displayed and reset via the hand-held controller.
Self-Correction:
- An electronic circuit in the pump automatically corrects any power phase deviation.
Need help?
General
To Next Page