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Ulvac C30VR Series - Page 2

Ulvac C30VR Series

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Table of Contents

Default Chapter9
- Table of Contents9
Compressor Unit Safety Instructions13
- Table 1-6 Electromagnetic Environment Resistance Characteristics15
Disposal Considerations17
C30Vr_Compressor Description19
C30VR Compressor Instruction Manual20
Considerations before Installation33
Unpacking and Inspection49
Equipment Installation, Piping, and Wiring55
Operation69
Wiring and Piping Removal and Storage75
Maintenance79
Troubleshooting89
Appendix A Operating Log95
- Table A-1 Operating Log95
- Table B-1 Combination of C30VR Series Compressor and Cryopump/Supertrap97
Appendix B Combination of C30V R Compressor Unit and Cryopump/Supertrap ······ B-199
Appendix C C30VR Schematic Diagram99
- Table C-1 Differences on Devices between Compressor Unit Models99
Appendix D C30V R Compressor Flow Diagram105
- P.2-4 Table 2-3 "Recommended Cooling Water for Compressor109

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