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Before Using This Product
Thank you very much for purchasing the ULVAC product.
Upon receiving this product, please make sure that it is the correct model you ordered
and check for any damages caused during transportation.
To ensure many years of use from the product, please read the instruction manual
and fully understand the safety precautions, specifications, and operating
instructions before installing, operating, inspecting, or servicing the product.
All copyright of this instruction manual belongs to ULVAC, Inc.
Any part of this instruction manual must not be copied without our permission.
Also, this instruction manual must not be disclosed or transferred to any third
party without our written consent.
Please note that the contents of this instruction manual are subject to change or
revision without any notice due to changes in specifications and product improvement.
Safety Symbol Marks
This instruction manual uses the safety symbol marks as the warning indications
for the operator to understand the matters they must observe. The terms of the
safety symbol marks are as follows:
It indicates a dangerous situation that could cause death or severe
injury if the warning is ignored.
Ignoring this warning may cause severe damage to the operator's
life or the plant facilities (including this product).
It indicates a dangerous situation that could cause minor or
moderate injury when the caution is ignored.
Ignoring this caution may cause minor injury to the operator,
product damage, or situations that require product adjustment.
WARNING
CAUTION