Home
Ulvac
Controller
CRTM Series
Ulvac CRTM Series - User Manual
160 pages
Manual
Specs
Ask a question
Save Page as PDF
To Next Page
To Next Page
Loading...
No.SK00-8202-S
I-120-00
I
Deposition
Controller
Instruction Manual
CRTM series
Quartz Crystal Deposition Controller
CRT
M-
R1
This instruction manual is intended for products with the
following serial numbers and later:
S/N 0001～
Be sure to read this manual
before using this produ
ct.
Keep it with care to use it
at any time.
ULVAC,Inc. Com
ponents D
ivision
https://www.ul
vac.co.jp
/
2
Table of Contents
Main Page
Table of Contents
7
Overview
10
Standard Specifications
11
Equipment Configuration and External View
13
Equipment Configuration
13
External View
14
Crtm-R1
14
Ctm(-D)
17
Sensors
19
Types of ULVAC Sensors
19
Cooling Water Standard for ULVAC Sensors
22
Types of Quartz Crystal Plates and Precautions
23
Cable
24
Preparation
25
Mounting on Rack
25
Power Supply
25
Installing the Quartz Crystal Oscillator Sensor
25
Wiring of if Card
26
Wiring of DIO Card
27
Wiring for AO Card
28
Wiring for External Communications
28
Precautions before Use
29
Flow of CRTM-R1 Use
30
Signal Specifications
32
Analog Output(AO) Specifications
32
IF Card Analog Output
32
AO Card Analog Output (A0-9 to A0-16) Specifications
32
Digital Input (DI) Specifications
34
Digital Output (DO) Specifications
35
RS-232C Communication Specifications
36
Lan（Ethernet）Communication Specifications
36
Program
37
On-Screen Operation
37
Menu
38
Data Display
39
CTM Details Screen
40
System Parameter
42
Date & Time
43
Lan
45
Others
46
CRTM Operation When XTAL ERROR Occurs
49
Time Power
49
Test Mode
50
Editable Mode
50
Ctm
51
6.3.2.5.1. Multi-Sensor Operation
52
6.3.2.5.2. Resume
54
6.3.2.5.3. Calc-Z
56
6.3.2.5.4. Calc Thickness Mode
56
Process Program
57
Process Program Copy
58
Depo Program
59
Depo Program Comment
60
Material Table
60
Depo Program Copy
62
Deposition Sequence
63
Abort Sequence
66
Setting
66
6.3.4.6.1. Determining the Z-Ratio
71
Determination of
75
Tooling = 100
75
6.3.4.6.3. Filter Type
75
6.3.4.6.4. Feedback Control Parameter Setting
75
Ability
79
Digital Input Port Program
80
Digital Output Port Program
83
Status
84
Phase
85
Thk
85
Rate
85
Frequency
86
Time
86
Error
86
Hearth
87
Sensor
87
Warning
87
Source Shutter
88
Sensor Shutter
88
Multi Sensor Next
88
Heart Beat
88
No Use
88
Pulse
88
Analog Output Port Program
89
Material Table Edit
90
File Manager
91
Program Manager
92
File Operation
93
Usb > Crtm
93
Crtm > Usb
94
File Name and Extension
95
Logging Manager
95
Logging Manager LOG File
96
Operation
97
Contents of LOG File
99
Procces Log
99
Communication Log
100
Engineer Log
100
IO Log
101
Alarm History
101
Alarm & Warning LOG File
101
Alarm & Warning Log
102
Acquisition Operation
102
Contents of LOG File
102
Application Update
104
Firmware Update
106
External Communication
108
Communication Protocol
108
Serial Communication
108
Lan（Ethernet）Communication
108
Command Description
109
Communication Check
109
Setting of System Parameter
109
Batch Request for Depo Program
109
Program
109
Request for Process Program
109
Set
109
Setting of Depo Program
113
Setting of Process Program
114
Batch Setting of System Parameter
116
Batch Setting of Depo Program
117
Batch Setting of Process Program
117
Setting of Process Program Set
117
Request for System Parameter
118
Request for Depo Program
119
Request for Process Program
120
Parameter
120
Request for Data
122
Request for DI/O STATUS
126
Request for Alarm/Warning
127
Information
127
Alarm & Warning Information
128
Maintenance
131
Frequency Test
131
Key Test
132
Display Test
133
DI Monitor
134
DO Test
135
AO Test
136
RS232C Test
137
Ethernet Test
138
PID Auto Tune
139
10.10. Factory Reset
143
Information
144
Description of Functions
145
Film Thickness Measurement
145
Deposition Sequence
146
Upper Jump/Lower Jump
146
Transition of Operating Status
148
Troubleshooting
149
Maintenance
151
Crtm-R1
151
Consumable Parts
151
Fuse Replacement
151
Ctm
152
Warranty
155
Warranty Covered Items
155
Warranty Period
155
Warranty Scope
155
Warranty Support
155
Disclaimer
155
Other
156
Reference Material
157
Installation of Optional Cards
157
Ec Declaration of Conformity
158
Certificate of Contamination
159
Need help?
Do you have a question about the Ulvac CRTM Series and is the answer not in the manual?
Ask a question
Ulvac CRTM Series Specifications
General
Brand
Ulvac
Model
CRTM Series
Category
Controller
Language
English
To Next PageTo Next Page
Need help?
General
