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Ulvac GHD-031A - Page 14

Ulvac GHD-031A
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1.2 Safety Data Sheet (SDS)
The attached “Safety Data Sheet (SDS)” shows chemical materials which may be used or
touched when operating the pump. Read the SDS carefully in order to understand the harmful
properties of these materials.
Contact us before using chemical materials (vacuum pump oil) other than those mentioned
in this instruction manual.
SDS is submitted as reference information to ensure safe handling of hazardous and
harmful materials. Personnel handling the pump oil should be aware that proper
measures must be taken depending on the conditions of use as their responsibility.
Keep in mind that the SDS itself is not a warranty for safety. Newest SDS shall
be used when the safety of material is investigated
Caution

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