－11－
If fine particles, dust or dirt, etc are evacuated, the pump may malfunction. If
moisture is evacuated, not only does the ultimate pressure increase but also the
inside of the pump becomes rusty causing the pump to malfunction.
Oil please establish the capacities more than oil countercurrent quantity to the
vacuum room side approximately 300mL at the time of a pump stop in a short time between
a stop valve (A) which I flow backward, and figure 2 shows to by all means,
installation of leak valve (B) or a pump and a vacuum room by any chance when
countercurrent prevention mechanism does not act.
The inlet filter in the inlet port has been adopted to prevent foreign matter from
entering the pump. Do not remove the inlet Filter.
Note
Note
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