－29－
Problem Cause Measures
Reference
①The pump is too small for the
volume of the vacuum chamber.
①Select another pump. ５．２
②The pressure measurement
method is not correct.
②Measure the pressure correctly. ５．１
③The vacuum gauge is not
suitable.
③Measure with a calibrated
vacuum gauge suitable for the
pressure range.
５．１
④The pipe connected to the inlet
port is small, or the piping
distance is long.
④Use pipes having a diameter
larger than the inlet port
diameter, or reduce the distance
from the vacuum.
５．１
⑤The wire mesh at the inlet port is
clogged.
⑤Remove the piping from the
upper section of the inlet port,
and clean the wire mesh.
６．２
⑥The specified amount of oil has
not been added.
⑥Add the specified amount of
oil.
６．３
⑦The oil has deteriorated. ⑦Replace the oil. ６．３
⑧Leakage occurs from the pipe
connected to the pump.
⑧ Locate the leakage with a
leakage detector and stop the
leakage.
--
⑨Our specified oil is not being
used.
⑨Overhaul the pump and replace
with oil specified by us.
６．３
The pressure does
not decrease.
⑩ Oil does not circulate, or the
oil hole of the cover is clogged.
⑩Overhaul and clean the oil hole. ６．２
① Problem with power supply
voltage.
①Set the power supply voltage to
within ±10% of the rated
voltage.
３．５
②The motor malfunctions. ②Replace the motor. ６．２
③Foreign matter has entered the
pump.
③Eliminate the foreign matter
and overhaul the pump.
６．２
④The specified amount of oil has
not been added.
④Add the specified amount of
oil.
６．３
Abnormal sound is
generated.
⑤The coupling malfunctions. ⑤Overhaul (replace the
coupling).
６．２
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