－8－
4. INSPECTION
4.1 Scheduled Inspection
Periodically measure the pressure in the pump with the optional pressure
monitor mounted to the pressure monitor mounting port.
Verify that the pressure at start of the oil sealed rotary vacuum pump or
immediately after evacuation of the vacuum chamber from atmospheric
pressure is 0.03 MPa (0.3 kg/cm
2
) (gauge pressure). If it is higher than 0.03
MPa (0.3 kg/cm
2
) (gauge pressure), it is necessary to replace the filter element
and check the pressure relief valve.
4.2 Replacing the Filter Element (Refer to Fig. 5)
If the filter element is clogged, replace it, as a rule.
4.2.1 Remove the filter element
(1) Stop the pump or put the pump under no-load operating condition
and loosen the Allen screw (M8) that fixes the oil mist trap to the
pump to remove the oil mist trap. (If piping is connected to the
exhaust side, remove it.)
(2) Loosen the hex nut (M10) at the center of the exhaust port to remove
the flange.
(3) Loosen the hex nut (M10) to remove the parts of the pressure relief
valve.
(4) Loosen the spacer nut to remove the filter keep plate.
(5) Remove the filter element.
This completes the removal of the filter element.
CAUTIONS:
① Before replacing the filter element, check if the interior of the oil
mist trap or the pressure relief valve is contaminated with dust or
foreign matter. If so, remove it by cleaning.
② The seal washer can not be reused.
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