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Varian HS-20 - User Manual

Varian HS-20
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HS-20
Diffusion Pump
Instruction Manual
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
(781)861-7200
Manual No. 6999-01-120
Revision G
October 2000

Questions and Answers

  • T
    Thomas PerezSep 4, 2025
    What to do if there is excessive or too cold cooling water in Varian Water Pump?
    • W
      wsmithSep 4, 2025
      If you notice excessive or too cold cooling water in your Varian Water Pump, check the temperature and adjust the flow.
  • P
    pscottSep 18, 2025
    What to do if Varian Water Pump experiences improper system operation and air release procedures?
    • J
      Jonathan BarberSep 18, 2025
      If your Varian Water Pump experiences improper system operation and air release procedures, review the procedures.
  • F
    fishercarlosSep 16, 2025
    What to do if Varian Water Pump experiences prolonged operation at high throughput at pressure above 10[-3] Torr?
    • T
      Tammy MontoyaSep 16, 2025
      If your Varian Water Pump experiences prolonged operation at high throughput at pressure above 10[-3] Torr, review the procedures.
  • M
    Matthew RandolphSep 14, 2025
    What to do if Varian Water Pump has low heat input?
    • C
      cooperjonathanSep 14, 2025
      If your Varian Water Pump has low heat input: check voltage, check for continuity, burned-out element, and poor thermal contact.
  • E
    Elizabeth FlemingSep 12, 2025
    What to do if there is a leak in the system ahead of the Varian Water Pump inlet?
    • A
      Angela RojasSep 13, 2025
      If there is a leak in the system ahead of the pump inlet of your Varian Water Pump, check and correct it.
  • D
    davidmendezSep 12, 2025
    What causes inlet pressure surges in Varian Water Pump?
    • J
      Joshua RushSep 12, 2025
      Inlet pressure surges in your Varian Water Pump can be caused by incorrect heater input. Check and correct the heater input.
  • J
    jill54Sep 9, 2025
    What to do if Varian Water Pump has improperly located jets?
    • D
      David DixonSep 9, 2025
      If the jets in your Varian Water Pump are improperly located, check and repair or replace them.
  • K
    Karen CarpenterSep 7, 2025
    What to do if the Varian Water Pump assembly is malfunctioning?
    • N
      Nathan MitchellSep 7, 2025
      If the pump assembly of your Varian Water Pump is malfunctioning, check and repair or replace it.
  • D
    David HowardSep 5, 2025
    What to do if there is water in the quick-cool coil of Varian Water Pump?
    • N
      Nathan ChaneySep 6, 2025
      If there is water in the quick-cool coil of your Varian Water Pump, check and remove the cause.
  • M
    mary36Aug 21, 2025
    What to do if my Varian Water Pump has poor pump or system performance?
    • K
      Katherine NelsonAug 21, 2025
      If your Varian Water Pump exhibits poor performance, several factors could be responsible: * Leaks in the system, whether virtual or real: You should locate and repair any leaks. * High process gas load: Measure the gas load and eliminate the cause. * System dirty: Clean the system to reduce outgassing.

Summary

Contact Information

Telephone and FAX Support Numbers

Provides key telephone and FAX numbers for Varian sales and service offices globally.

Warranty Details

Warranty Replacement and Adjustment Procedures

Outlines the process for making and handling warranty claims and product returns.

Safety Considerations and Hazards

Warning and Caution Symbol Definitions

Explains the meaning and usage of warning and caution symbols in the manual.

Detailed Hazards and Precautions

Lists and describes potential hazards during operation and installation with corrective actions.

Section I: Installation

1-1 General Installation Guidance

Initial inspection and familiarization with the manual before installation.

1-2 Operating Specifications

Lists the technical specifications for the HS-20 diffusion pump.

1-3 Physical Specifications

Details the physical dimensions, materials, and weight of the HS-20 diffusion pump.

1-4 Unpacking and Cleaning

Procedures for unpacking and cleaning the diffusion pump before installation.

1-5 Utility and System Connections

Guidelines for connecting vacuum, cooling water, electrical systems, and safety interlocks.

1-6 Adding Pump Fluid

Instructions and precautions for filling the diffusion pump with operating fluid.

Section II: Operation

2-1 Start-up Procedure

Step-by-step guide for safely starting up the diffusion pump.

2-2 Shutdown Procedure

Step-by-step guide for safely shutting down the diffusion pump.

Section III: Maintenance

3-1 General Maintenance Overview

General advice on performing periodic checks for trouble-free operation.

3-2 Periodic Inspection

Recommended checks for the diffusion pump's condition and fluid level.

3-3 Pump Cleaning Procedure

Instructions for cleaning the diffusion pump when fluid deterioration occurs.

3-4 Cold Cap Disassembly and Reassembly

Detailed steps for taking apart and putting back together the cold cap assembly.

3-5 Jet Assembly Procedures

Information on the HS-20 jet assembly subassemblies and disassembly/reassembly.

3-6 Heater Replacement

Step-by-step instructions for replacing the diffusion pump's heating elements.

3-7 Replaceable Parts List

A comprehensive list of part numbers and descriptions for replaceable components.

Section IV: Troubleshooting

4-1 Leakage Detection

Identifying common locations for leaks and their impact on performance.

4-2 Outgassing Issues

Understanding and estimating gas load due to outgassing in high-vacuum systems.

4-3 Poor Pump or System Performance

Common faults, probable causes, and corrective actions for performance issues.

Varian HS-20 Specifications

General IconGeneral
BrandVarian
ModelHS-20
CategoryWater Pump
LanguageEnglish

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