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Varian HS-20 User Manual

Varian HS-20
43 pages
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HS-20
Diffusion Pump
Instruction Manual
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
(781)861-7200
Manual No. 6999-01-120
Revision G
October 2000

Questions and Answers:

Varian HS-20 Specifications

General IconGeneral
BrandVarian
ModelHS-20
CategoryWater Pump
LanguageEnglish

Summary

Contact Information

Telephone and FAX Support Numbers

Provides key telephone and FAX numbers for Varian sales and service offices globally.

Warranty Details

Warranty Replacement and Adjustment Procedures

Outlines the process for making and handling warranty claims and product returns.

Safety Considerations and Hazards

Warning and Caution Symbol Definitions

Explains the meaning and usage of warning and caution symbols in the manual.

Detailed Hazards and Precautions

Lists and describes potential hazards during operation and installation with corrective actions.

Section I: Installation

1-1 General Installation Guidance

Initial inspection and familiarization with the manual before installation.

1-2 Operating Specifications

Lists the technical specifications for the HS-20 diffusion pump.

1-3 Physical Specifications

Details the physical dimensions, materials, and weight of the HS-20 diffusion pump.

1-4 Unpacking and Cleaning

Procedures for unpacking and cleaning the diffusion pump before installation.

1-5 Utility and System Connections

Guidelines for connecting vacuum, cooling water, electrical systems, and safety interlocks.

1-6 Adding Pump Fluid

Instructions and precautions for filling the diffusion pump with operating fluid.

Section II: Operation

2-1 Start-up Procedure

Step-by-step guide for safely starting up the diffusion pump.

2-2 Shutdown Procedure

Step-by-step guide for safely shutting down the diffusion pump.

Section III: Maintenance

3-1 General Maintenance Overview

General advice on performing periodic checks for trouble-free operation.

3-2 Periodic Inspection

Recommended checks for the diffusion pump's condition and fluid level.

3-3 Pump Cleaning Procedure

Instructions for cleaning the diffusion pump when fluid deterioration occurs.

3-4 Cold Cap Disassembly and Reassembly

Detailed steps for taking apart and putting back together the cold cap assembly.

3-5 Jet Assembly Procedures

Information on the HS-20 jet assembly subassemblies and disassembly/reassembly.

3-6 Heater Replacement

Step-by-step instructions for replacing the diffusion pump's heating elements.

3-7 Replaceable Parts List

A comprehensive list of part numbers and descriptions for replaceable components.

Section IV: Troubleshooting

4-1 Leakage Detection

Identifying common locations for leaks and their impact on performance.

4-2 Outgassing Issues

Understanding and estimating gas load due to outgassing in high-vacuum systems.

4-3 Poor Pump or System Performance

Common faults, probable causes, and corrective actions for performance issues.

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