Veeco MPS-3000 CE User Manual

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MPS-3000 CE

Power Supply

Technical Manual

425964

Table of Contents

Power Supply1
Table of Contents4
Safety5
- Manual Mode8
- Local Mode8
- Local Restricted Mode8
Overview8
- Remote Mode9
- Single Power Supply System Assembly10
Installation10
- Front Panel: MPS-3000 CE FC12
- Front Panel: MPS-3000 CE HC12
Controls12
- MPS-3000 CE FC/HC/PBN Front Panel Keys and Switches13
- Power - On/Standby14
- Source - On/Off14
- Beam - On/Off14
- Local Restricted15
- Mode15
- Keylock15
- Memory16
- Remote16
- Module17
- Beam17
- Accel17
- Cathode17
- Hc18
- Neut18
- Hcn18
- Pbn18
- Function19
- Voltage19
- Current19
- A/B Ratio19
- Discharge Voltage Display20
- Adjust Knob20
- Discharge Current Display20
- Cathode Filament Current Display20
- Accelerator Voltage Display21
- Neutralizer Emission Current Display21
- Neutralizer Filament Current Display21
- Probe21
- PBN Emission / Filament Current Display22
- PBN Body Voltage Display22
- Source/Beam Connector23
- Neutralizer Connector23
- Circuit Breaker23
- Power Input23
- Controller Board Switch Definitions24
- Interlock Connector (DB9)24
- Emission Fuse (F8)24
- Switch Settings for Switch Bank24
- Sw1-725
- MPS-3000 CE HC and PBN25
- Sw1-5, Sw1-625
- Controller Board Alarm Switch26
- Factory Switch Settings for Switch Bank26
- Mps-3000 Ce Fc27
- FC Start-Up27
Manual Operation27
- FC Adjustment32
- FC Storing Operating Conditions33
- FC Recalling Operating Conditions33
- HC Start-Up34
- HC Recalling Operating Conditions39
- Mps-3000 Ce Pbn39
- PBN Start-Up39
- PBN Adjustment44
- PBN Recalling Operating Conditions45
- PBN Storing Operating Conditions45
Local Operation46
Remote Operation49
Other Modes of Operation49
EIA-232 Pin Assignment50
Serial Communications50
- Command Summary Table52
- Detailed Command Description53
- A/B Ratio Limit53
- The Auto Cathode Mode53
- Disable Auto Data Logging54
- Enable Auto Error Logging54
- Set the Accelerator Voltage54
- Turn the Beam Supply on55
- Set the Beam Current Tolerance Limit55
- Set the Beam Current55
- Set the Cathode Filament Current Target56
- Set the Beam Voltage56
- Set the Cathode Filament Limit57
- Set the Keeper Voltage Limit57
- Set the Discharge Current57
- Set the Discharge Current Limit58
- Set the Discharge Current Threshold58
- Set the Discharge Current Voltage58
- Disable the E/B Ratio Error59
- Place the MPS-3000 Power Supply in Local Mode59
- Set the Neutralizer Filament Current Target60
- Set the Emission Current60
- Front Panel Switches Lockout60
- Set the Neutralizer Limit61
- Recalling Memory 161
- Request All Target Parameters65
- If the Source And/Or Beam Are on66
- If the Source and Beam Are off66
- Setting the Auto Data Log Time Interval67
- Turn on the Source Supplies67
- Fuse List69
- Mps-3000 Ce Hc69
Maintenance69
- Replacing the Fuses70
- Replace Fuse F1 through F770
- Updating the Software71
- Replace Fuse F8 or F971
- Replacing the Switches72
- Returning an MPS-3000 CE Power Supply72
- MPS-3000 CE Power Supply Troubleshooting73
Troubleshooting/Error Code Definitions73
Error Code Definitions74
Service Support77
Specifications78
- Mechanical79
- Electrical79
- Environmental80
- Power Output81
- Cathode Current Supply81
- Discharge Voltage Supply81
- Beam Voltage Supply81
- Accelerator Voltage Supply82
- Neutralizer Current Supply82
- Hollow Cathode Current Supply82
- Discharge Current Supply82
- Hollow Cathode Neutralizer Current Supply83
- Plasma Bridge Neutralizer Current Supply85
- Programmed Limit Values85
- Recommended Initial Filament Current Limits87
- Recommended Current Filament Current Limits87
- Recommended Discharge Current Limits87
Tables87
Environmental Safety88
Drawings89
- Filament Cathode with Filament Neutralizer or PBN Option89
- Hollow Cathode and HCN - 7 Pin or 2 X 4 Pin Feedthrough89
- Hollow Cathode and Hollow Cathode Neut - 6 Pin Feedthrough89
- 3Cm Source Filament Cathode and Filament Neutralizer89
- 3Cm Source Hollow Cathode and Hollow Cathode Neutralizer89
- 3Cm Source Plasma Bridge Neutralizer96

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Veeco MPS-3000 CE Specifications

General

Brand	Veeco
Model	MPS-3000 CE
Category	Power Supply
Language	English