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Veeco MPS-3000 CE User Manual

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MPS-3000 CE
Power Supply
Technical Manual
425964

Table of Contents

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Veeco MPS-3000 CE Specifications

General IconGeneral
BrandVeeco
ModelMPS-3000 CE
CategoryPower Supply
LanguageEnglish

Summary

Safety

Hazard Symbols

Explains danger, warning, and caution symbols indicating potential hazards and their severity.

Unit Symbols

Defines symbols used on the unit, such as chassis ground and protective earth grounding point.

Electrical Safety Precautions

Provides warnings and recommendations for avoiding electrical shock during operation and maintenance.

Overview

Operational Modes

Describes Manual, Local, Local Restricted, and Remote operating modes for the power supply.

Front Panel Controls

Diagrams and tables illustrating and identifying front panel keys, switches, and displays.

Controller Board Switches

Defines the function of switches on the controller board for configuration and operation.

Installation

Power Supply Assembly and Connections

Instructions for rack mounting and connecting power, source/beam, neutralizer, and interlock cables.

Power Source Connection

Guidance on connecting the unit to a power source, including wiring details.

Manual Operation

FC Power Supply Operation

Steps for starting and adjusting the FC power supply in Manual mode.

HC Power Supply Operation

Steps for starting and adjusting the HC power supply in Manual mode.

PBN Power Supply Operation

Steps for starting and adjusting the PBN power supply in Manual mode.

Local Operation

Local Mode Operation by Model

Describes local mode operation for FC, HC, and PBN models, including microprocessor monitoring.

Performing Local Mode Operation

Step-by-step guide for operating the power supply in Local mode.

Other Modes of Operation

Local Restricted Mode

Mode limited to recalled memory conditions with minimal user intervention.

Remote Operation

Control of the power supply remotely via a computer and EIA-232 interface.

Serial Communications

EIA-232 Interface and Pin Assignment

Details on the serial communication interface standard and pin connections.

Command Set Overview

Lists available commands and provides detailed descriptions for controlling the power supply.

Maintenance

General Maintenance Guidelines

Information on user-serviceable parts, fuse replacement, and software updates.

Fuse Replacement Procedures

Step-by-step instructions for replacing fuses F1 through F9.

Software Updating Procedure

Instructions for updating the power supply software by replacing the PROM.

Switch Replacement and Unit Return

Guidance on replacing switches and returning the unit for service.

Troubleshooting/Error Code Definitions

Power Supply Troubleshooting Table

Lists common problems, their probable causes, and suggested remedies.

Error Code Definitions

Defines error codes (E01-E26), probable causes, and suggested remedies.

Service Support

Contact Information and Procedures

Veeco contact details and essential information required for service or parts.

Specifications

General Power Supply Description

Overview of the MPS-3000 CE chassis, power supplies, and naming conventions.

Mechanical and Electrical Specifications

Details on dimensions, weight, handling, input power, and electrical codes.

Environmental Operating Conditions

Specifications for operating and storage environments (temperature, humidity, altitude).

Power Output Specifications

Details power output characteristics for FC, HC, and PBN models.

Tables

Recommended Initial Filament Current Limits

Table showing initial cathode and neutralizer current limits for different source sizes.

Recommended Current Filament Current Limits

Table listing cathode, neutralizer, and PBN current limits for ion sources.

Recommended Discharge Current Limits

Table providing discharge current limits based on ion source size.

Environmental Safety

Product Lifecycle and Waste Management

Information on resource extraction, hazardous substances, and recycling systems.

Drawings

Filament Cathode with Neutralizer or PBN Option Wiring

Wiring diagram for Filament Cathode with Filament Neutralizer or PBN Option.

Hollow Cathode and HCN Feedthrough Wiring

Wiring diagram for Hollow Cathode and HCN with specific feedthrough configurations.

Hollow Cathode and Hollow Cathode Neutralizer Wiring

Wiring diagram for Hollow Cathode and Hollow Cathode Neutralizer (6 pin).

3cm Source Filament Cathode and Neutralizer Wiring

Wiring diagram for 3cm Source Filament Cathode and Filament Neutralizer.

3cm Source Hollow Cathode and Neutralizer Wiring

Wiring diagram for 3cm Source Hollow Cathode and Hollow Cathode Neutralizer.

3cm Source Plasma Bridge Neutralizer Wiring

Wiring diagram for 3cm Source Plasma Bridge Neutralizer.