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Wyko NT3300 User Manual

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OPERATING INSTRUCTIONS
FOR
Wyko NT3300
Optical 3D Profiling System
UCLA Nanoelectronics Research Facility
420 Westwood Plaza
14-131A Engineering IV Building
Los Angeles, CA 90095
Rev. 01/28/05
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Wyko NT3300 Specifications

General IconGeneral
BrandWyko
ModelNT3300
CategoryIndustrial Electrical
LanguageEnglish

Summary

Introduction

System Overview

Describes the Wyko NT3300 system components: operator control station and motorized sample station.

Starting the Wyko

Logbook and Startup

Check logbook, sign in, and follow steps to power on the Wyko and start the Vision software.

Recalibration Procedure

Procedure for recalibrating the Wyko using calibration standards after initial startup.

VSI Mode Operation

VSI Calibration

Step-by-step guide to calibrate the Wyko system for Vertical Scanning Interferometry measurements.

VSI Measurement Process

Instructions for placing samples and initiating measurements using VSI mode.

PSI Mode Operation

PSI Calibration

Detailed steps for calibrating the Wyko system for Phase Shifting Interferometry measurements.

PSI Measurement Process

Procedures for setting up and taking measurements using PSI mode.

Analyzing Measurement Data

2D Data Display

How to display profile slices from surface height data and adjust region selection.

3D Data Plotting

Creating 3D renderings of surface areas and adjusting plot visualization options.

Stitching Measurements

Configuring Stitching

Steps to enable and configure stitching for measuring samples larger than a single field of view.

Turning Off the Wyko

Wyko Shutdown Steps

Instructions for properly closing software and powering down the Wyko system.

Measurement Tips

Material Specific Tips

Guidance on measuring transparent materials and limitations for step height.

Troubleshooting

Tilt Head Stuck

Procedure to reset the system if the tilt head becomes stuck.