IV. PSI – Mode (Phase Shifting Interferometry):
PSI – Calibration:
1. Select the MEASUREMENT OPTIONS icon from the toolbar.
2. Select the INTENSITY box from the Measurement Options window. Arrange both
windows side by side.
3. Select PSI from the measurement type box and verify the following settings:
Resolution = Full
Objective = 5X
FOV = 1.0X
4. Raise the objective by turning the “Z-Axis” control knob clockwise while holding
down the “Fast” button.
5. Place the PSI calibration sample (Fig. 2) on the stage.
6. Using the Intensity window, setup the hardware for coarse focusing by going under
HARDWARE →FILTER → PSI LOW MAG.
7. Focus on the edge of the mirror by slowly lowering the objective (You may need to
translate the stage to locate this edge). DO NOT allow the objective to contact any
surface.
8. Adjust the intensity as needed to avoid saturation using the slidebar (saturation is
indicated by red fringes). After focusing on the edge of the mirror, change the
objective to 20X and find the best focus on the mirrors surface. Dark fringes should
now be visible on this surface.
9. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to display 3-4 fringes.
10. Now setup the hardware for the final focusing by going under
HARDWARE →FILTER → PSI HIGH MAG, then readjust your final focus and
intensity. The intensity should be set to just below the saturation limit of the CCD
camera.
11. Select the CALIBRATE box from the Measurement Options window.
12. Select the AUTO CALIBRATE option.
13. Select OK to complete the calibration.
14. To accept the new calibration number, Select OK.
15. Repeat steps 6-13 to calibrate any remaining objectives that will be used.
16. When calibration is complete, raise the objective and carefully remove the calibration
standard and place it back into its container.
PSI – Measurements:
1. Place your sample in the center of the table. If your sample is small and requires
stabilization, turn on the vacuum located on the floor and verify that the switchbox
located on top of the CRT monitor is set to position “A”
2. If the Measurements Options window isn’t already open, open it by clicking on the
MEASUREMENT OPTIONS icon from the toolbar.
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