3. Select the INTENSITY box from the Measurement Options window. Arrange both
windows side by side.
4. Select VSI from the measurement type box and set the following settings to your
desired field of view. (
The field of view for several optics combinations are in Table 1)
Resolution =
Objective =
FOV =
5. Using the Intensity window, setup the hardware for coarse focusing by going under
HARDWARE →FILTER → PSI LOW MAG.
6. Focus on your sample by carefully lowering the objective. DO NOT allow the
objective to contact any surface.
7. Adjust the intensity as needed to avoid saturation using the slidebar. Once you find
the best focus at the TOP of the feature/step, dark fringes should now be visible on
this surface.
8. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to orient 3-4 fringes
perpendicular to the step.
9. Now setup the hardware for the final focusing by going under
HARDWARE →FILTER → VSI, then readjust your final focus and intensity.
10. After you have found the best focus and intensity, click on the VSI Options tab in
order to adjust additional parameters such as the following:
Speed of Measurement =
Back scan =
Length of Scan =
Modulation Threshold =
11. After setting all options, select OK from the Measurement Options window.
12. Close the intensity window.
13. To measure your sample, Select NEW.
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