Yes YES-PB8-2HV - User Manual

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610-14224-01, Revision 0

YES-PB8-2HV

Yield Engineering Systems

610-14224-01 Revision 0

Operation, Software, and

Maintenance Manual

Hi-Vac Processing System

YES-PB8-2HV

Main Page

Table of Contents4
Table of Contents5
Table of Figures9
Introduction10
Process Description10
Applications10
Sub-Atmospheric Process10
Hi Vacuum Process11
Features11
Specifications13
Process Exposed Parts13
Additional Parts13
System Power Requirements13
Process Vacuum Pump Power Requirements13
Turbo Pump Power Requirements13
Wafer Capacity13
Overall Dimensions14
Standard Tool14
With MFC Option/S14
With Control Console Remote Location14
Control Console, no Light Tower14
Control Console with Light Tower14
Weight, Distribution, and Mass Centers TBD15
Figure 1: Weight Distribution and Mass Centers15
Energy Consumption16
Process Gas Consumption16
System Set up and Test17
Safety17
Safety Signal Word Definitions17
Unavoidable Hazards17
Type 3 Electrical Hazards17
Type 4 Electrical Hazards17
Type 5 Electrical Hazards18
Cabinet Safety Grounding18
Figure 2: Panel Grounding Fastener Locations - Main Machine19
Figure 3: Panel Grounding Fastener Locations - Control Console19
Chamber Temperature20
Vacuum Pump Temperature20
Hazard Warning Labels21
Figure 4: Front View Hazard Label Location21
Figure 5: Left View Hazard Label Locations21
Figure 6: Right View Hazard Label Locations22
Figure 7: YES-PB8 -2HV Rear View Hazard Label Locations22
Figure 8: YES-PB8 -2HV Console Hazard Label Locations23
EMO Circuit24
Figure 9: EMO Circuit24
Lockout Procedure25
Electrical25
Pneumatic/Reactant Gasses25
Turn the System on26
Figure 10: Temperature Controller26
Temperature Controller Factory Setup27
Keypad Operation27
PID and Remaining Settings29
Adjust the Pressure Gauge Set Points31
Upper Cycle Purge Limit31
Lower Cycle Purge Limit31
Figure 11: Pressure Gauge31
Set the O2 Analyzer Set Points32
Figure 12: Plumbing Layout - O2 Analyzer32
Process Pump33
Turbo Pump33
Clean the Chamber33
Adjust Gas Flows33
MFC Option33
Standard Gas Inlet Needle Valve33
Adjust the Process Vacuum Throttle Valve34
System Operation35
Operation Panel35
Recipes #1-835
Dehydration35
Pump down to Process Pressure35
Temperature Ramp35
Process Chamber Vent36
Operator Panel Recipe # 936
Chamber Vent36
Operator Panel Recipe # 036
Vacuum Test36
Hi-Vac Step(Turbo Pump)37
Temperature Controller37
Control Mode37
Figure 13: Temperature Display37
Programming38
Program Mode38
Temperature Controller Profile Program38
Figure 14: Program #1 Temperature Plot41
Safety Interlocks42
Door Lock42
Chamber/Gas Heaters over Temperature Monitors42
Door Seal Vacuum Interlock43
System Controller44
General Operation44
Touch Screen Operator Interface44
Touch Screen Panels46
Operator's Panel (no MFC Option)46
Operator's Panel Button Description46
Figure 15: Operator's Panel46
Operator Panel (MFC Option Only)47
Operator Panel Button Description (MFC Option Activated)47
Figure 16: Operator 2 Panel (MFC Active)47
Alarm Panel48
Alarm Window48
Figure 17: Alarm and Access Panel48
Figure 18: Alarm Window48
Alarm Panel Button Descriptions49
Operator Maintenance Panel50
Operator Maintenance Panel Button Descriptions50
Figure 19: Operator Maintenance Panel50
Engineer Maintenance Panel51
Figure 20: Engineer Maintenance Panel51
Recipe Set up Panel53
Recipe Set up Panel Descriptions53
Figure 21: Recipe Set up Panel53
Recipe 1 to 8 Set up Panel54
Recipe 1 to 8 Set up Panel Button Descriptions54
Figure 22: Recipe 1 to 8 Set up Panel54
Hi-Vac Parameter Panel Button Descriptions56
Figure 23: Hi-Vac Parameter Panel56
Com Device Display Panel Button Descriptions57
Figure 24: Com Device Display Panel57
Output Panel 158
Output Panel 1 Button Descriptions58
Figure 25: Output Panel 158
Output Panel 259
Output Panel 2 Button Descriptions59
Figure 26: Output Panel 259
Date/Time Panel60
Date/Time Panel Button Descriptions60
Figure 27: Date/Time60
Parameter Setup Panel61
Parameter Setup Panel Button Descriptions61
Figure 28: Parameters Set up Panel61
PID Panel63
PID Panel Button Descriptions63
Figure 29: PID Panel63
SCR Panel64
SCR Panel Button Descriptions64
Figure 30: SCR Panel64
Temperature Offset Panel66
Temperature Offset Panel Button Descriptions66
Figure 31: Temperature Offset Panel66
Fan Power Panel67
Fan Power Panel Button Descriptions67
Figure 32: Fan Power Panel67
Exhaust Damper Set up Panel68
Exhaust Damper Set up Panel Button Descriptions68
Figure 33: Exhaust Damper Set up Panel68
Flow Panel69
Flow Panel Button Descriptions69
Figure 34: Flow Panel69
Signal Tower Set up Panel70
Signal Tower Set up Panel Button Descriptions70
Figure 35: Signal Tower Set up Panel70
Additional Light States Panel71
Additional Light States Panel Button Descriptions71
Figure 36: Additional Light States Panel71
O2 Panel72
O2 Panel Button Descriptions72
Figure 37: O2 Panel72
Vacuum Set up Panel73
Vacuum Set up Panel Button Descriptions73
Figure 38: Vacuum Set up Panel73
Options Panel75
Options Panel Button Description75
Figure 39: Options Panel75
Intouch Set up Panel77
Intouch Set up Panel Button Descriptions77
Figure 40: Intouch Set up Panel77
Program Theory of Operation78
Functional Explanation78
Programming78
Input / Output List78
System Operation80
Process Operation80
Theory of Operation Electrical81
Theory of Operation Plumbing83
Process Gas Input Line83
Vacuum Output Lines83
Door Seal Vacuum83
Maintenance and Troubleshooting84
Intervals and Procedures84
Daily84
Weekly84
Monthly84
Commissioning Tool/Recycling84
Software Download Procedures85
PLC Software85
Figure 41: CTC Monitor Utility Files Form85
Figure 42: Changing Communication Configuration86
Figure 43: Message for Established Communication86
Figure 44: Set Controller IP Address87
Figure 45: Downloading the PLC File87
Touchscreen Software88
Figure 46: Opening Proface Software88
Figure 47: Proface File Transfer Screen89
Troubleshooting Process Problems90
Improper Curing90
Troubleshooting Equipment Problems90
Insufficient Facilities for Required Process90
Software91
Faulty Wiring or Instrumentation Malfunction91
Sizeable Vacuum Leak91
High Oxygen Concentration93
Troubleshooting Equipment Malfunctions94
Reference Table Procedures96
REF 1 - Door Seal Leaks96
REF 2 - Valve Repair96
REF 3 - Power on Switch96
REF 4 - Circuit Breakers97
REF 5 - Light Tower97
REF 6 - System Controller97
REF 7 - System Vacuum Gauges97
REF 8 - Temperature Controller97
REF 9 - Chamber Main Heaters98
REF 10 - Cooling Blower98
REF 11 - Process Gas Heater98
REF 12 - Process Vacuum Pump99
REF 13 - Solid State Relays99
REF 14 - Software (Program)99
REF 15 - Chamber Rear Trim Heater99
Ref 16 - Turbo Pump100
Alarm List101
Atm to Tp1 Ab101
Tp1 to Tp2 Ab101
Tp2 to Tp1 Ab101
Tp1 to Atm Ab101
High Temp Ab101
Door Temp High101
Pres lo Alm Ramp101
Pres lo Alm Dwell102
Pres lo Alm Cool102
Pressure Hi Ab102
Operator Reset102
Cabinet Overtemp102
Pro Gas Overtemp102
Failed to Reach Temp102
Hi Vac Starting Pres Abort102
Door Switch Not Made102
Foreline Pressure Boot102

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Yes YES-PB8-2HV Specifications

General

Brand	Yes
Model	YES-PB8-2HV
Category	Industrial Equipment
Language	English

Yes YES-PB8-2HV - User Manual

Table of Contents

Yes YES-PB8-2HV Specifications