6 Memory
[Test Parameters for Vth Acquisition]
MeasGate: SMU connected to Gate terminal
MeasDrain: SMU connected to Drain terminal
MeasSource: SMU connected to Source terminal
VgStart: Sweep start voltage for Gate terminal
VgStop: Sweep stop voltage for Gate terminal
VgStep: Sweep step voltage for Gate terminal
Vd: Drain voltage
IgLimit: Gate current compliance
Id@Vth: Current determining the threshold voltage
[Extended Test Parameters for Vth Acquisition]
Vs: Source voltage
HoldTime: Hold time
DelayTime: Delay time
Vth_Min: Minimum Vth value for graph scale
Vth_Max: Maximum Vth value for graph scale
DrainMinRng1: Minimum range for drain current measurement on device 1
DrainMinRng2: Minimum range for drain current measurement on device 2
DrainMinRng3: Minimum range for drain current measurement on device 3
[Measurement Parameters]
[Measurement Paramaters for Vth Acquisition after Write Operation]
Drain current: Idrain
[Measurement Parameters for Vth Acquisition after Erase Operation]
Drain current: Idrain
[Analysis Function]
[Analysis Function for Vth Acquisition after Write Operation]
Vth@Id=@L1X (X intercept of Line1)
[Analysis Function for Vth Acquisition after Erase Operation]
Vth@Id=@L1X (X intercept of Line1)
[Auto Analysis]
[Auto Analysis for Vth Acquisition after Write Operation]
Line1: Idrain=X intercept of Id@Vth
[Auto Analysis for Vth Acquisition after Erase Operation]
Line1: Idrain=X intercept of Id@Vth
[X-Y Plot]
[X-Y Plot for Vth Acquisition after Write Operation]
X axis: Gate voltage Vgate (LINEAR)
Y1 axis: Drain current Idrain (LOG)
[X-Y Plot for Vth Acquisition after Erase Operation]
X axis: Gate voltage Vgate (LINEAR)
Y1 axis: Drain current Idrain (LOG)
[List Display]
[List Display for Vth Acquisition after Write Operation]
Gate voltage Vgate
Drain current Idrain
Agilent EasyEXPERT Application Library Reference, Edition 8
6-11