15 Structure
15.9 Diode BVAndCj-V SCUU: Diode junction capacitance and breakdown
voltage measurement using SCUU (A.01.20)
[Supported Analyzer]
B1500A
[Description]
Measures the reverse bias junction capacitance and breakdown voltage by using one MFCMU, two SMUs,
and a set of SCUU/GSWU.
For a more accurate measurement, perform correction data measurement at the measurement frequency before
starting the capacitance measurement.
If the measurement frequency is not included in the list of default frequencies below, click the Advanced
Options... button and set the measurement frequency on the Frequency area of the Advanced Options for CMU
Calibration window.
Default frequencies:
1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k, 1 M, 1.2 M, 1.5 M, 2 M, 2.5 M, 2.7 M, 3 M, 3.2 M, 3.5 M,
3.7 M, 4 M, 4.2 M, 4.5 M, 5 MHz
[Device Under Test]
Diode
[Required Modules and Accessories]
One MFCMU module, two SMU modules, and a set of SCUU/GSWU are required.
SCUU connections: Output1: anode, Output2: cathode
Connection wire must be connected between the GSWU and the DUT interface High/Low guard lines for the
capacitance measurements.
[Device Parameters]
L: Diode length
W: Diode width
Temp: Temperature
[Test Parameters]
IntegTime: Integration time
[Test Parameters: for Junction Capacitance Measurements]
AnodeAC: CMU connected to Anode terminal
FREQ: Measurement frequency
OscLevel: Measurement signal level
VBiasStart: DC bias start voltage
VBiasStop: DC bias stop voltage
VBiasStep: DC bias step voltage
[Test Parameters: for Breakdown Voltage Measurements]
AnodeDC: SMU connected to Anode terminal, primary sweep voltage output
VanodeStart: Sweep start voltage for Anode terminal
VanodeStop: Sweep stop voltage for Anode terminal
VanodeStep: Sweep step voltage for Anode terminal
Ianode@BV: Anode current at breakdown
CathodeDC: SMU connected to Cathode terminal, constant voltage output
[Extended Test Parameters]
Agilent EasyEXPERT Application Library Reference, Edition 8
15-18
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