15 Structure
Y1 axis: Film capacitance (parallel capacitance) Cp (LINEAR)
Y2 axis: Dissipation factor D (LINEAR)
Y3 axis: Conductance G (LINEAR)
[List Display]
Measurement frequency Freq
DC bias VmetalA
Film capacitance (parallel capacitance) Cp
Conductance G
Series capacitance Cs
Series resistance Rs
Parallel resistance Rp
Dissipation factor D
Reactance X
Impedance Z
Phase Theta
Agilent EasyEXPERT Application Library Reference, Edition 8
15-25