15 Structure
15.21 Rdiff-I: Diffusion resistor R-I characteristics (A.01.11)
[Supported Analyzer]
B1500A, 4155B, 4155C, 4156B, 4156C
[Description]
Measures the resistance vs current characteristics (R-I characteristic).
[Device Under Test]
Diffusion resistor, 3 terminals
[Device Parameters]
Polarity: Ntype (SMUs force the specified value) or Ptype (SMUs force the negative specified value).
L: Resistor length
W: Resistor width
Temp: Temperature
[Test Parameters]
IntegTime: Integration time
Port1: SMU connected to resistor, primary sweep current output
I1Start: Primary sweep start current
I1Stop: Primary sweep stop current
I1Step: Primary sweep step current
V1Limit: Port1 voltage compliance
Subs: SMU connected to substrate, secondary sweep voltage output
VsubsStart: Secondary sweep start voltage
VsubsStop: Secondary sweep stop voltage
VsubsStep: Secondary sweep step voltage
IsubsLimit: Subs current compliance
Port2: SMU connected to resistor, constant voltage output
[Extended Test Parameters]
V2: Port2 output voltage
HoldTime: Hold time
DelayTime: Delay time
[Measurement Parameters]
Port1 measurement voltage V1
[User Function]
Resistance R=V1/I1
Sheet resistance Rsheet=R*W/L
[X-Y Graph]
X axis: Port1 output current I1 (LINEAR)
Y1 axis: Port1 measurement voltage V1 (LINEAR)
Y2 axis: Resistance R (LINEAR)
[List Display]
Port1 output current I1
Port1 measurement voltage V1
Resistance R
Sheet resistance Rsheet
Agilent EasyEXPERT Application Library Reference, Edition 8
15-37