15 Structure
15.22 Rdiff-V kelvin: Diffusion resistor R-V characteristics, Kelvin connection
(A.01.20)
[Supported Analyzer]
B1500A
[Description]
Measures the resistance vs voltage characteristics (R-V characteristic).
[Device Under Test]
Diffusion resistor, 3 terminals
Connect the Port1 and VM1 modules to a terminal, the Port2 and VM2 modules to the other terminal.
[Device Parameters]
Polarity: Ntype (SMUs force the specified value) or Ptype (SMUs force the negative specified value).
L: Resistor length
W: Resistor width
Temp: Temperature
[Test Parameters]
IntegTime: Integration time
Port1: SMU connected to resistor, primary sweep voltage output
V1Start: Primary sweep start voltage
V1Stop: Primary sweep stop voltage
V1Step: Primary sweep step voltage
I1Limit: Port1 current compliance
Subs: SMU connected to substrate, secondary sweep voltage output
VsubsStart: Secondary sweep start voltage
VsubsStop: Secondary sweep stop voltage
VsubsStep: Secondary sweep step voltage
IsubsLimit: Subs current compliance
Port2: SMU connected to resistor, constant voltage output
VM1: SMU connected to resistor, constant current output
VM2: SMU connected to resistor, constant current output
[Extended Test Parameters]
V2: Port2 output voltage
IM1: VM1 output current
IM2: VM2 output current
HoldTime: Hold time
DelayTime: Delay time
Port1MinRng: Minimum range for the port1 current measurement
[Measurement Parameters]
Port1 measurement current I1
VM1 measurement voltage Vm1
VM2 measurement voltage Vm2
[User Function]
Voltage between terminals DeltaV=Vm1-Vm2
Resistance R=DeltaV/I1
Sheet resistance Rsheet=R*W/L
Agilent EasyEXPERT Application Library Reference, Edition 8
15-38
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