Agilent Technologies EasyEXPERT

2 CMOS
2.22 IonIoffSlope: On current, off current, and subthreshold slope (A.01.20)
[Supported Analyzer]
B1500A, 4155B, 4155C, 4156B, 4156C
[Description]
Extracts the on current, off current, and subthreshold slope from the Id-Vg characteristics.
[Device Under Test]
MOSFET, 4 terminals
[Device Parameters]
Polarity: Nch (SMUs force the specified value) or Pch (SMUs force the negative specified value).
Lg: Gate length
Wg: Gate width
Temp: Temperature
IdMax: Drain current compliance
[Test Parameters]
IntegTime: Integration time
Gate: SMU connected to Gate terminal, primary sweep voltage output
VgStart: Sweep start voltage for Gate terminal, VgStart < 0
VgStop: Sweep stop voltage for Gate terminal, VgStop=Vd
VgStep: Sweep step voltage for Gate terminal
Drain: SMU connected to Drain terminal, constant voltage output
Vd: Drain voltage
Subs: SMU connected to Substrate, constant voltage output
Vsubs: Substrate voltage
Source: SMU connected to Source terminal, constant voltage output
[Extended Test Parameters]
Vs: Source voltage
IgLimit: Gate current compliance
IsubsLimit: Substrate current compliance
HoldTime: Hold time
DelayTime: Delay time
DrainMinRng: Minimum range for the drain current measurement
[Measurement Parameters]
Drain current Idrain
[User Function]
Slope=1/diff(lgt(Idrain),Vgate)
SlopeMin=min(abs(Slope))
[Analysis Function]
Ion=@L1Y1 (Y1 intercept of Line1)
Ioff=@L2Y1 (Y1 intercept of Line2)
[X-Y Plot]
X axis: Gate voltage Vgate (LINEAR)
Y1 axis: Drain current Idrain (LOG)
Y2 axis: Slope (LINEAR)
Agilent EasyEXPERT Application Library Reference, Edition 8
2-36