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STP-A2203 Series
BOC Edwards STP-A2203 Series - User Manual
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MT-41E-002-A
BOC Edwards Japan Limited
Nov. 2003
Copyright 2003 BOC Edwards Japan Limited.
All rights reserved. Printed in Japan.
STP-A2203 Series
Turbomolecular Pump
INSTRUCTION MANUAL
(Second Edition- a)
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
q
uickl
y
access it at an
y
time.
2
Table of Contents
Main Page
Limited Warranty
9
Table of Contents
11
Precautions for Safe Operation of the STP Pump
16
Usable Gases
16
Maintenance and Inspection Precautions
16
Labels
16
Operation Principle of the STP Pump
20
Figure 2.1 Cross Sectional View of the STP Pump
21
Unpacking
22
Unpacking the STP Pump and the STP Control Unit
22
Accessories
23
Table 3.1 Accessories
23
Table 3.2 Optional Accessories
23
Figure 3.1 Example of Lifting the STP Pump
23
Installation of the STP Pump
24
Name and Function of each Part
24
Figure 4.1 Configuration of the STP Pump
25
Precautions before Installation
26
Operating Environment
26
Installation Area
27
Bench
27
How to Install the STP Pump
29
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment
29
Cleaning the Seal
30
STP Pump Installation Positions
31
Figure 4.3 STP Pump Installation Positions
31
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
31
How to Secure the STP Pump
32
Table 4.1 Tightening Torque of Bolt
32
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
33
Figure 4.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)
33
Figure 4.7 Example of Securing the STP Pump
33
Table 4.3 Number of Claw Clamps by Size of Flange
34
Figure 4.6 Shape of Reduced Diameter Shank Bolts
34
Vacuum Piping
36
Connecting the Purge Port
38
Figure 4.9 Connecting the Purge Port
38
Connecting the Cooling Water Valve (for Use with TMS Unit Only)
39
Figure 4.10 External Dimensions of Cooling Water Valve
40
Figure 4.11 Piping of Cooling Water Valve
41
How to Introduce a Purge Gas
42
Cooling the STP Pump
43
Water Cooling Method
43
Baking the STP Pump
44
Attaching a Baking Heater
44
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater
45
Installation of the STP Control Unit
46
Name and Function of each Part
46
Front Panel
46
Figure 6.1 STP Control Unit Front Panel
48
Rear Panel
49
Figure 6.2 STP Control Unit Rear Panel
49
Precautions before Installation
50
Operating Environment
50
Insulation Test
50
Installation Area
51
Figure 6.3 Peripheral Space of the STP Control Unit
51
Attaching the STP Control Unit to a Rack
52
Figure 6.4 Example of Securing the STP Control Unit
52
Cable Connection
53
Name and Dimensions of each Cable
53
Figure 6.5 External Dimensions of each Cable
53
How to Connect the Cables
54
Table 6.1 Connecting the Power Cable
55
Connecting to Semiconductor Equipment
56
Connecting to Power
56
Emergency off Circuit (EMO Circuit)
56
How to Start/Stop the STP Pump
57
Before Starting
57
Start Procedures
58
Stop Procedures
58
Manual Operation
59
Powering on
59
Starting the STP Pump
59
Stopping the STP Pump
60
Starting the STP Pump after Stopping
60
Powering off
60
Starting the STP Pump after a Safety Function Operates
60
Remote Operation
61
Powering on
61
Starting/Stopping the STP Pump
61
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)
61
Starting the STP Pump after Stopping
62
Powering off
62
Starting the STP Pump after a Safety Function Operates
62
Table 7.2 Reset Operation During Remote Operation (REMOTE X7)
62
Operating the TMS Unit (for Use with the TMS Unit Only)
63
Starting/Stoping
63
Temperature Control
63
Figure 7.1 STP Pump Operation Procedures
64
Remote Input/Output Signal Connector
65
Input Signal Pins
65
Table 8.1 REMOTE X7 Input Signal Pins
66
Figure 8.1 REMOTE X7 Input Signal Pins
67
Output Signal Pins
68
Table 8.2 REMOTE X7 Output Signal Pins
68
Figure 8.2 REMOTE X7 Output Signal Pins
70
Table 8.3 Rated Contacts for Relays CR1 to CR8
71
Adjustment Methods
72
Tuning
72
Tuning Method
72
Each of Data after Tuning
73
Table 9.1 Data List
73
Figure 9.1 Tuning Procedures
74
Confirmation Mode
75
Parameter Set Mode
77
Figure 9.3 Parameter Setting Method
78
Figure 9.4 Remote Mode Setting Method
79
Safety Functions
80
Power Failure
80
Table 10.1 States of Lamps and REMOTE Output Signals at a Power Failure
81
Table 10.2 Operations of the STP Pump after a Power Recovery
81
Abnormal State of Magnetic Bearing
82
Excessive Vibration
82
Motor Driver Overload
82
Overheating Inside the STP Pump
82
Overheating Inside the STP Control Unit
83
Overspeed
83
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
83
Troubleshooting, Maintenance, and Inspection
88
Troubleshooting Immediately after an Abnormality/Error Occurs
88
11.1.1 Troubleshooting Power Failure
88
11.1.2 Troubleshooting Other Abnormality/Error
88
When Error Message Is Displayed on LCD
89
11.2.1 Error Messages
89
Table 11.1 Error Messages
90
Other Abnormalities
95
11.3.1 Abnormalities When Powering on
95
11.3.2 Abnormalities When Performing the STP Pump Start Operation
95
Table 11.2 Troubleshooting after Powering on
95
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation
95
11.3.3 Other Abnormalities
96
Table 11.4 Troubleshooting While the STP Pump Is Rotating
96
WARNING" Message Display Function
97
11.4.1 First Damage Limit
97
11.4.2 Second Damage Limit
98
11.4.3 Caution X_H, Y_H, X_B, Y_B, Z
98
ERROR RECORD" Message Display Function
98
Maintenance and Inspection
99
11.6.1 Cleaning and Decontamination
100
Table 11.5 Cleaning and Decontamination
100
11.6.2 Inspecting the Deposit
101
11.6.3 Overhaul
102
11.6.4 Transporting for Repair or Overhaul
103
Storage and Disposal
104
Storage of the STP Pump
104
Storage of the STP Control Unit
104
Disposal
105
Specifications
106
Specifications for the STP Pump
106
Table 13.1 Specifications for the STP Pump
106
Figure 13.1 External Appearance of the STP Pump
107
Specifications for the STP Control Unit
110
Table 13.2 Specifications for the STP Control Unit
110
Unit Conversion Table
113
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BOC Edwards STP-A2203 Series Specifications
General
Brand
BOC Edwards
Model
STP-A2203 Series
Category
Water Pump
Language
English
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