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PFC-552HC
Brooks Automation PFC-552HC User Manual
64 pages
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Polycold Fast Cycle (PFC)
W
ater V
apor
Cryopump
Operation Manual
825160-00, revision B
2
Table of Contents
Default Chapter
3
Table of Contents
3
1 Introduction
5
Description and Applications
5
PFC Versions
8
PFC Performance Specifications
9
Using this Manual
11
2 Safety
12
Overview
12
Safety Alerts Defined
13
Safety Precautions for the PFC
15
Safety Guidelines
18
Equipment Guidelines
19
Standard Symbols on the Equipment
21
Safety Labels on the PFC
22
Safety and Operational Interlocks
38
General Hazards
39
Electrical Hazards
42
Lockout/Tagout (LOTO)
45
Gas Hazards
47
Vacuum Hazards
48
Fire and Explosion Hazards
49
Recycling
50
Chemical Hazards
50
Emergency Conditions
51
Emergency Contact Information
51
Material Safety Data Sheets
52
3 Operation
53
Controls and Indicators
53
Modes of Operation
56
Operating the PFC with a Cryocoil
58
Operating the PFC with a Cryobaffle
61
4 Appendix
63
Cryosurface Temperature Versus Water Vapor Partial Pressure
63
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Brooks Automation PFC-552HC Specifications
General
Brand
Brooks Automation
Model
PFC-552HC
Category
Water Pump
Language
English
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