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Brooks Automation PFC-672HC - User Manual

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Polycold Fast Cycle (PFC)
Water Vapor Cryopump
Operation Manual
825160-00, revision B
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Summary

Safety Guidelines and Precautions for the PFC

Safety Overview and Alerts

Provides a general overview of safety guidelines, alerts, and precautions for PFC operation and maintenance.

Understanding Safety Alerts

Explains the different types of safety alerts (Danger, Warning, Caution) and their corresponding pictograms and meanings.

General PFC Safety Precautions

Details general safety precautions applicable to the PFC, including specific warnings and cautions.

Essential Safety Guidelines for Operation

Lists essential guidelines for safe use and service of the PFC, covering operational and maintenance practices.

Personnel Safety and SEMI Standards

Details personnel safety and SEMI S2-0200 electrical work safety classifications.

General Hazards in PFC Operation

Outlines general hazards associated with the PFC, including high gas pressure and electrical hazards.

Electrical Hazards and Protection

Discusses electrical hazards, power consumption, and circuit breaker/fuse protection.

Operating the Polycold Fast Cycle (PFC) Unit

Brooks Automation PFC-672HC Specifications

General IconGeneral
BrandBrooks Automation
ModelPFC-672HC
CategoryWater Pump
LanguageEnglish

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