Brooks Instrument SLA5800 Series - User Manual

47 pages

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Beyond Measure

Installation & Operation Manual

SLA5800 Series

Mass Flow Controllers & Meters

Main Page

Table of Contents3
Section 1 Introduction5
Purpose5
Specifications5
SLA5800 Series Standard Specifications6
SLA5800 Series Biotech Specifications7
SLA5800 Series Electrical Specifications8
Certifications9
SLA5800 Series Certifications9
Reference Conditions11
Biotech Option Packages11
PC-Based Support Tools11
Fast Response Performance12
Calibration Selection12
Selectable Soft Start12
General Wiring12
Response Performance of Brooks Digital MFC13
Linear Ramp-Up And/Or Ramp-Down from 200% Per Second down to 0.5% Per Second Setpoint Change13
SLA5800 Series RS485 15-Pin Analog Connector and Pinouts14
SLA5800 Series Profibus Connections and Pinouts15
Ethernet/Ip™ & PROFINET M8 Power Connection and Pinnout16
SLA5800 Series Devicenet Connections and Pinouts17
SLA5800 Series Ethercat Connections and Pinouts18
SLA5850/SLA5851/SLA5860/SLA5861 Dimensions19
SLA5853/SLA5863 Dimensions20
Section 2 Installation21
Receipt of Equipment21
Recommended Storage Practice21
Return Shipment21
Transit Precautions22
Removal from Storage22
Gas Connections22
In-Line Filter22
Recommended Filter Size22
Installation23
Electrical Interface26
RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version26
Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)27
Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)27
RS485 Multidrop Interconnection Tmfs and PC28
Operation Check Procedure (Analog I/O)29
Operation Check Procedure (Digital I/O)30
Bus/Network (Devicenet, Profibus, Foundation Fieldbus, Ethercat)30
Features (Standard and Biotech)31
Analog I/O Mode of Operation32
Externally Accessible Adjustment (Zero Button) for All Meters/Controllers33
RS485 Communications Features (Analog Versions Only)34
Ethernet/Ip™ Communications Features34
Devicenet Communications Features35
Profibus Communications Features35
Ethercat Communications Features36
Alarms (Analog Versions Only)36
Alarms (Analog Versions Only) Configuration Attributes37
Diagnostic Alarms (Analog Versions Only)38
General Alarms (Analog Versions Only)38
Calibration/Configuration Sets39
Special Features39
Setpoint Ramping40
Low Setpoint Command Cutoff40
Low Flow Output Cutoff40
Adaptive Control40
Flow Totalizer40
PC-Based Support Tools40
Troubleshooting Analog or Digital42
Section 4 Maintenance & Troubleshooting43
System Checks43
Bench Troubleshooting Circuit44
Sensor Troubleshooting44
Cleaning Procedures46
Calibration Procedure46
Troubleshooting46

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Brooks Instrument SLA5800 Series Specifications

General

Brand	Brooks Instrument
Model	SLA5800 Series
Category	Measuring Instruments
Language	English

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