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Provides a general introduction to the chapter's content.
Details the technical performance metrics of the robot.
Outlines operating conditions, electrical requirements, and ratings.
Describes physical dimensions, mounting, and vacuum requirements.
Explains the methods for interacting with the robot system.
Provides documentation details and hazard identification.
Provides a general introduction to the chapter's content.
Details compliance standards and essential safety advice.
Explains built-in safety features and the emergency stop system.
Highlights potential physical and electrical risks during operation.
Details risks related to lasers, gases, chemicals, and thermal/vacuum.
Provides emergency actions and hazardous material handling.
Provides a general introduction to the chapter's content.
Specifies installation site conditions and initial unpacking steps.
Outlines procedures for robot mounting and connecting components.
Details connecting peripherals and configuring system interfaces.
Ensures safety measures are functional and prepares for initial use.
Describes final procedures for robot check-out and alignment.
Provides a general introduction to the chapter's content.
Describes the main control unit and essential accessories.
Explains interaction methods and optional robot components.
Provides a general introduction to the chapter's content.
Summarizes all operational interfaces and their connections.
Details power connections, high voltage barriers, and cable handling.
Covers controller fuse specifications and safety ground connections.
Provides a general introduction to the chapter's content.
Explains how to move and set the home position for robot axes.
Outlines defining robot movement points and teaching configurations.
Describes procedures for mapping wafer positions and teaching scanner data.
Details robot parameter files and the setup of the flipper end effector.
Provides a general introduction to the chapter's content.
Guides the user through aligning the robot within the system.
Provides instructions for calibrating the vacuum sensor and setting up the flipper.
Explains how to optimize motor control parameters for performance.
Details adjustments for the R-axis home sensor and related parameters.
Provides a general introduction to the chapter's content.
Details the command set and the robot's software control system.
Explains automated sequences and data storage for robot positions.
Lists and explains key commands for robot operation.
Provides a general introduction to the chapter's content.
Outlines routine procedures to maintain the robot's condition.
Provides instructions for cleaning robot surfaces and lubricating leadscrews.
Details vacuum hose replacement, belt checks, and diagnostic tests.
Explains how to perform diagnostic tests using the teach pendant.
Provides a general introduction to the chapter's content.
Guides users through resolving common problems during robot initialization.
Lists frequently encountered issues and common user queries.
Explains how to query and interpret the robot's operational status.
Provides solutions for specific robot symptoms and error codes.
Provides information on how to obtain assistance from the manufacturer.
Provides a general introduction to the chapter's content.
Lists the default configurations for various operational modes.
Details specifications for compatible laser scanner models.
Provides details on available configurations for HAMA Laser Sensors.
Provides a general introduction to the chapter's content.
Presents the wiring diagram for the SEMI S2 I/O board.
Shows the connection schematic for the TTR-200 Teach Pendant using a DB37.
Shows the connection schematic for the TTR-200 Teach Pendant using a DB68.
General